退火气氛对溶胶-凝胶法制备ZnO∶Sn薄膜性能的影响

发布时间：2018-12-14 09:06

【摘要】：采用溶胶-凝胶法以旋涂的方式在石英玻璃上制备锡掺氧化锌(ZnO∶Sn)透明导电薄膜,在不同的退火气氛下对薄膜进行热处理,以此研究退火气氛对薄膜的微观结构和光电性能的影响。通过X射线衍射仪、扫描电子显微镜、紫外-可见分光光度计和四探针测试仪等手段对薄膜样品进行分析表征,实验表明:不同气氛条件下热处理的ZnO∶Sn薄膜仍为六方纤锌矿结构并沿c轴择优生长,且在可见光范围(400~900 nm)样品的平均透过率均超过80%。其中,在氮气气氛下退火处理的薄膜电阻率减小至3.152×10~(-2)Ω·cm,在惰性气体中热处理有效提高了薄膜的光电特性。
[Abstract]:Tin doped zinc oxide (ZnO:Sn) transparent conductive thin films were prepared on quartz glass by sol-gel method. The films were annealed in different annealing atmosphere. The effect of annealing atmosphere on the microstructure and optoelectronic properties of the films was studied. The films were characterized by X-ray diffractometer, scanning electron microscope, UV-Vis spectrophotometer and four-probe tester. The experimental results show that the ZnO:Sn films annealed in different atmosphere are still hexagonal wurtzite structure and preferential growth along the c-axis, and the average transmittance of the samples in the visible light range (400 ~ 900 nm) is over 80%. The resistivity of the films annealed in nitrogen atmosphere is reduced to 3.152 脳 10 ~ (-2) 惟 cm, and the optical and electrical properties of the films are improved effectively by heat treatment in inert gas.
【作者单位】：景德镇陶瓷大学机械电子工程学院;
【基金】：国家自然基金项目(61464005,51562015) 江西省青年重点基金项目(20153BCB23004) 江西省科技支撑计划资助项目(2010BGA01100) 江西省对外合作资助项目(20132BDH80025,20151BDH80031) 江西省自然基金资助项目(20143ACB21004,20151BAB202010,20151BAB212008) 江西省主要学科学术和技术带头人培养计划项目(20123BCB22002) 江西省高等学校科技落地计划(KJLD12085,KJLD14075) 江西省教育厅科技资助项目(GJJ12494,GJJ13643,GJJ13625) 景德镇市科技项目(2013-1-4,2014-2-22,2014-1-3)
【分类号】：TB383.2

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