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ZrWN-Ag复合膜的力学性能和摩擦磨损性能研究

发布时间:2019-01-03 14:16
【摘要】:通过非平衡磁控溅射仪制备了不同Ag含量的ZrWN-Ag纳米复合膜,采用X射线衍射仪、扫描电镜、能谱仪、纳米压痕仪、摩擦磨损仪和三维形貌仪等对薄膜的微结构、成分、表面形貌、力学性能和室温及高温摩擦磨损性能进行表征,并探讨了复合膜在不同温度下的摩擦磨损机制.结果表明:ZrWN-Ag复合膜是由面心立方的ZrWN、W_2N和弥散分布的晶态Ag相组成.随着Ag含量增加,薄膜的硬度先增大后减小.室温下,薄膜的摩擦系数和磨损率随Ag含量增加而逐渐降低;温度由200℃升高至700℃时,薄膜摩擦系数逐渐降低,磨损率逐渐增大,温度一定时,Ag含量越高,复合膜的摩擦系数越低,但磨损率越高.研究表明:Ag的加入改善了薄膜力学性能、室温下的摩擦磨损性能以及高温下的摩擦性能,但高温下的磨损性能未得到改善.
[Abstract]:ZrWN-Ag nanocomposite films with different Ag content were prepared by unbalanced magnetron sputtering. The microstructure and composition of the films were investigated by X-ray diffractometer, scanning electron microscope, energy spectrometer, nano-indentation instrument, friction and wear instrument and three-dimensional topography instrument. The surface morphology, mechanical properties, friction and wear properties at room temperature and high temperature were characterized, and the friction and wear mechanisms of the composite films at different temperatures were discussed. The results show that the ZrWN-Ag composite film is composed of ZrWN,W_2N with face centered cube and crystalline Ag phase with dispersive distribution. With the increase of Ag content, the hardness of the film first increases and then decreases. At room temperature, the friction coefficient and wear rate decrease with the increase of Ag content. When the temperature increases from 200 鈩,

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