基于分子碰撞理论的静压导轨气膜内部微振动现象的分析

发布时间：2019-06-14 18:20

【摘要】：静压导轨气膜微振动已经成为制约气浮支撑发展的重大问题。为证实气膜内部的微振动本质是高压气体在流动过程中与支撑底面、节流器壁面和气浮块壁面发生碰撞,导致气膜区域内表面受到变化的冲量,形成不规律的水平和垂直方向冲击力,使得气浮块发生基于系统固有频率及其倍频的微振动。通过理论分析,建立描述气膜支撑区动力学特性的振动模型,并进行了仿真分析和实验对比验证,证实了气膜内部微振动的形成机制。分析结果表明:有气腔与无气腔的节流方式都会产生气膜微振动;进气孔直径相同情况下,有气腔节流方式下的振动大于无气腔节流方式下的振动;振动峰值的频率点基本一致,其频域曲线所显示的振动规律也基本相同。
[Abstract]:The film micro-vibration of hydrostatic guideway has become a major problem restricting the development of air floatation support. In order to prove that the essence of micro vibration in the gas film is that the high pressure gas collides with the supporting bottom surface, the throttle wall and the air floating block wall during the flow process, resulting in the change of impulse on the inner surface of the gas film region, the formation of irregular horizontal and vertical impact force, and the micro vibration of the air floating block based on the natural frequency and frequency doubling of the system. Through theoretical analysis, a vibration model describing the dynamic characteristics of gas film support region is established, and the simulation analysis and experimental comparison are carried out to verify the formation mechanism of micro vibration in gas film. The analysis results show that the throttling mode with and without gas cavity will produce gas film micro-vibration; when the diameter of inlet cavity is the same, the vibration in gas cavity throttling mode is larger than that in no gas cavity throttle mode; the frequency point of vibration peak value is basically the same, and the vibration law shown in frequency domain curve is basically the same.
【作者单位】：昆明理工大学机电工程学院;
【基金】：国家自然科学基金资助项目(51305185)
【分类号】：TB123

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