Thermal stability and separation characteristics of anti-sti

发布时间：2024-03-08 05:07

　　The thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films are studied in this paper. Several types of adhesion layers were investigated: 10.0 nm Pt, 1.5 nm Cr + 50.0 nm Pt, 2.5 nm Cr+ 50.0 nm Pt and 3.5 nm Cr + 50.0 nm Pt fabricated using direct current magnetron sputtering. The variation of layer thickness, roughness, crystallization and surface topography of Pt/Cr films were analyzed by grazing incidence X-ray reflectometry, large angle X-ray diffraction and o...

【文章页数】：7 页


本文编号：3922053