音圈电机驱动的柔性定位平台设计与控制

发布时间：2019-03-14 12:38

【摘要】：设计了一种二自由度柔性微定位平台,该平台主要由音圈电机和柔性铰链机构等组成.采用直角柔性铰链组成的双平行四杆机构对称安置,以实现平台的大行程和运动解耦,工作行程可达2,mm以上,定位精度可达纳米级.设计空间支撑机构保证其承载能力.对微定位平台进行了结构设计和承载能力等特性分析.考虑到该定位平台动态行为的特点,采用遗传算法优化的BP神经网络组合辨识方法对系统模型进行了辨识,克服了神经网络对复杂系统动态行为辨识存在的缺陷.基于神经网络PID复合逆控制方法对微定位平台进行控制,通过实验对辨识和控制方法进行了验证,结果表明遗传算法优化的神经网络辨识方法与神经网络PID复合逆控制方法适用于该音圈电机驱动的柔性微定位平台系统的实际应用.
[Abstract]:A two-degree-of-freedom flexible micro-positioning platform is designed, which is mainly composed of voice coil motor and flexure hinge mechanism. A double parallel four-bar mechanism composed of right-angle flexure hinges is installed symmetrically in order to realize the large stroke and motion decoupling of the platform. The working stroke is more than 2 mm and the positioning accuracy is up to nano-scale. The space supporting mechanism is designed to ensure its bearing capacity. The structure design and bearing capacity of the micro-positioning platform are analyzed. Considering the characteristics of the dynamic behavior of the positioning platform, the BP neural network combination identification method optimized by genetic algorithm is used to identify the system model, which overcomes the shortcomings of the neural network in the dynamic behavior identification of complex systems. Based on the neural network PID compound inverse control method, the micro-positioning platform is controlled, and the identification and control method is verified by experiments. The results show that the neural network identification method optimized by genetic algorithm and the neural network PID compound inverse control method are suitable for the practical application of the flexible micro-positioning platform system driven by the voice coil motor.
【作者单位】：天津大学机构理论与装备设计教育部重点实验室;广东省精密装备与制造技术重点实验室;
【基金】：国家自然科学基金资助项目(51675376,51675371,51675367,51275337) 欧盟2020地平线H2020-MSCA-RISE-2016项目(734174);欧盟第七框架生物医疗机器人项目(612641) 欧盟2020地平线和科技部重点研发项目(S2016G4501,644971) 特种车辆及其传动系统智能制造国家重点实验室开放课题项目(GZ2016KF007) 广东省精密装备与制造技术重点实验室开放课题项目(PEM201602)~~
【分类号】：TH122

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