海水环境高性能类石墨碳薄膜摩擦学研究

发布时间：2018-09-12 15:49

【摘要】：机械密封在液压传动、泵、阀、反应釜等设备中普遍使用。然而现有的摩擦副材料无法满足其在苛刻环境下(海水环境)的密封要求,开发新材料、新技术势在必行。本论文以非平衡磁控溅射技术在不锈钢和单晶硅表面制备的高性能Cr/GLC碳基薄膜为研究对象,并进一步研究了该类石墨碳基薄膜与典型的金属配副(316L、440C、Al、Ti、H62、GCr15)和陶瓷配副(Si3N4、SiC、WC、Al2O3、ZrO2)在模拟海水环境下的摩擦学行为;另外,利用等离子刻蚀技术与磁控溅射技术结合的方法在单晶硅表面构筑织构化Cr/GLC碳基薄膜,并研究在大气、水和模拟海水环境下的摩擦学行为。为Cr/GLC薄膜在海水环境下配副选型和摩擦学性能的提高提供实验依据和理论指导。系统研究了Cr/GLC薄膜与金属配副(316L、440C、Al、Ti、H62、GCr15)和陶瓷配副(Si3N4、SiC、WC、Al2O3、ZrO2)在模拟海水环境中的摩擦学性能,结果表明:同等条件下,GLC薄膜与金属配副的摩擦系数均介于0.083-0.179之间。GLC-Ti和GLC-H62的磨损机制为局部断裂;另外,GLC-Al配副磨损机制为黏着磨损。GLC薄膜与陶瓷配副的摩擦系数在0.06-0.11之间。从GLC薄膜磨损形貌观察GLC薄膜既无黏着磨损和也无局部断裂磨损。与金属配副相比,GLC薄膜与陶瓷配副对磨时,GLC薄膜表现更优异的摩擦学性能。利用等离子刻蚀技术在单晶硅表面刻蚀不同尺寸的微坑(5.5?m,1.5?m,600nm,none),将其作为基底,利用非平衡磁控溅射技术制备Cr/GLC碳基薄膜,研究在大气、水和模拟海水环境下的摩擦学性能。在这三种环境下,织构化Cr/GLC薄膜的摩擦系数由微坑尺寸的从大到小呈现先减小后增大的规律,尺寸为1.5?m织构化Cr/GLC薄膜表现低摩擦的性能;在液体润滑(水和模拟海水)状态下,织构化Cr/GLC薄膜的磨损由尺寸的从大到小呈现先减小后增大的趋势,尺寸为600nm织构化Cr/GLC薄膜表现低磨损。
[Abstract]:Mechanical seals are widely used in hydraulic transmission, pumps, valves, reactors and other equipment. However, the existing friction pair materials can not meet the sealing requirements in harsh environment (seawater environment), so it is imperative to develop new materials. In this thesis, the high performance Cr/GLC carbon based films deposited on stainless steel and monocrystalline silicon by unbalanced magnetron sputtering were studied. The tribological behaviors of the graphite carbon based films with typical metal pairs (316L / 440C) and ceramic pairs (Si3N4,SiC,WC,Al2O3,ZrO2) under simulated seawater environment were also studied. The textured Cr/GLC carbon based films were fabricated on the surface of monocrystalline silicon by the method of plasma etching and magnetron sputtering. The tribological behaviors in atmosphere, water and simulated seawater were studied. It provides experimental basis and theoretical guidance for selection of pair and improvement of tribological properties of Cr/GLC film in seawater environment. The tribological properties of Cr/GLC thin film and metal pair (316L ~ (440C) and ceramic pair (Si3N4,SiC,WC,Al2O3,ZrO2) in simulated seawater environment have been studied systematically, and the tribological properties of the metal pair (316L / 440C) and ceramic pair (Si3N4,SiC,WC,Al2O3,ZrO2) have been studied. The results show that the wear mechanism of GLC-Ti and GLC-H62 is local fracture when the friction coefficient between GLC film and metal pair is 0.083-0.179 under the same condition, and the wear mechanism of GLC-Al pair is adhesive wear. The friction coefficient of GLC film and ceramic pair is 0.06-0.11. The wear morphology of GLC films shows that there is neither adhesive wear nor local fracture wear in GLC films. The tribological properties of GLC film are better than that of GLC film and ceramic pair. Cr/GLC carbon based films were prepared by plasma etching technique on the surface of monocrystalline silicon with different size micropits (5.5 m ~ (-1) ~ (1.5) m ~ (-1) ~ (6) nm ~ (-1) none. The tribological properties in atmosphere, water and simulated seawater were studied by using unbalanced magnetron sputtering technique. In these three environments, the friction coefficient of textured Cr/GLC thin films decreases first from large to small and then increases from large to small. The size of 1.5m textured Cr/GLC films exhibits low friction performance, while in liquid lubrication (water and simulated seawater), the friction coefficient of textured Cr/GLC thin films decreases firstly and then increases. The wear of textured Cr/GLC films decreased first from large to small and then increased. The size of 600nm textured Cr/GLC thin films showed low wear.
【学位授予单位】：哈尔滨师范大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：P754.5

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