基于低频调制激励的硅微陀螺仪自动模态匹配技术

发布时间：2018-01-28 21:39

本文关键词： 负刚度效应硅微陀螺仪低频振荡调制模态匹配自动频率调节　出处：《中国惯性技术学报》2016年04期 　论文类型：期刊论文

【摘要】：根据二阶质量-弹簧-阻尼系统的幅频特性和相频特性关于谐振频率对称的特点,提出了一种低频振荡激励的实时模态匹配技术,根据检测模态的输出响应来判别驱动模态和检测模态的匹配程度。首先简要介绍了带频率调谐功能的双质量线振动硅微陀螺仪,该陀螺利用负刚度效应来调节检测模态的谐振频率;然后通过理论推导以及系统仿真验证了基于低频调制激励的自动模态匹配技术的可行性和有效性;最后设计了一种基于现场可编程逻辑阵列(FPGA)的数字控制电路,并且对同一测试陀螺进行了模态匹配和模态不匹配下的性能对比。试验结果表明,相比模态不匹配条件下,陀螺零偏稳定性从5.89(°)/h提高到1.26(°)/h,角度随机游走从0.36(°)/√h提高到0.079(°)/√h,性能分别提高了4.7倍和4.6倍。
[Abstract]:According to the amplitude-frequency and phase-frequency characteristics of the second-order mass-spring-damping system, a real-time modal matching technique for low frequency oscillation excitation is proposed. According to the output response of the detection mode, the matching degree between the driving mode and the detection mode is determined. Firstly, the dual mass line vibrating silicon microgyroscope with frequency tuning function is briefly introduced. The gyroscope uses the negative stiffness effect to adjust the resonant frequency of the detection mode. Then the feasibility and effectiveness of the automatic modal matching technique based on low frequency modulation excitation are verified by theoretical derivation and system simulation. Finally, a digital control circuit based on FPGA (Field Programmable Logic Array) is designed, and the performance of the same test gyroscope under mode matching and modal mismatch is compared. Compared with the mode mismatch condition, the stability of the gyroscope is increased from 5.89 (掳/ h) to 1.26 (掳/ h). The angle random walk is increased from 0.36 (掳/ m ~ (-1) h) to 0.079 (掳/ hm ~ (-1) h), and the performance is improved by 4.7 times and 4.6 times, respectively.
【作者单位】：东南大学仪器科学与工程学院;东南大学微惯性仪表与先进导航技术教育部重点实验室;
【基金】：江苏省科技支撑计划项目(BE2014003-3) 预研基金资助项目(9140A09011313JW06119)
【分类号】：V241.5
【正文快照】： 随着微机电(MEMS)技术的发展,越来越多的微传感器进入各种应用领域,其中,硅微陀螺仪作为MEMS技术的典型代表,具有集体小,成本低,易于批量生产,耐冲击等突出优点,使其在军用和民用领域有广泛的应用前景[1]。但目前受加工工艺等因素的制约,硅微陀螺仪的性能还不能满足高精度领

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