多弧离子镀制备TiAlN-Cu多层膜的组织结构和性能研究

发布时间：2017-12-27 18:32

  本文关键词：多弧离子镀制备TiAlN-Cu多层膜的组织结构和性能研究　出处：《燕山大学》2015年硕士论文　论文类型：学位论文

  更多相关文章： 硬质薄膜 TiAlN-Cu多层膜 多弧离子镀 Hall-Petch

【摘要】：在传统的硬质薄膜中Ti Al N由于具有高硬度、高温抗氧化性(800℃)和高温热稳定性(达1470℃)已取代了Ti N薄膜,并广泛应用于机械领域中的刀具、模具和切削工具等部件上。Cu由于具有优良的塑性和延展性常加入到薄膜中以改善薄膜的综合性能。为了提高Ti Al N薄膜的综合力学性能,本课题在Ti Al N薄膜中加入不同厚度的Cu层,研究Cu层在Ti Al N-Cu多层膜中所起的作用,并与Ti Al N薄膜相比较,薄膜的硬度、膜基结合强度、韧性以及耐磨性是否有所提高。为了揭示多层膜的强韧化机制和耐磨性,对不同厚度Cu层的Ti Al N-Cu多层膜力学性能和摩擦磨损性能的影响进行了研究,并从理论上分析了Cu层厚度对多层膜综合性能的影响。本课题采用BY-DH-4A型多弧离子镀设备进行沉积制备薄膜,首先试验出沉积Ti Al N薄膜最优参数。采用Ti Al合金靶和Cu磁过滤靶交替沉积制备Ti Al N-Cu多层膜,为了提高薄膜膜基结合力,在衬底与薄膜之间增加一薄层Ti Al过渡层。选择实验参数:脉冲偏压为-100V,靶电流为90A,进行沉积Ti Al N-Cu多层膜,沉积Ti Al N在N2放电条件下,其工作气压为0.5Pa,沉积Cu层在Ar放电条件下,工作气压为0.3Pa,制备的Ti Al N-Cu多层膜为三层膜结构,Cu为中间层。通过实验研究和理论分析,多层膜结构可以影响薄膜的内残余应力,进而影响薄膜的硬度、膜基结合强度等力学性能。本论文对Ti Al N薄膜和不同Cu层厚度Ti Al N-Cu多层膜的力学性能研究表明,当Cu层厚度在81nm时,Ti Al N-Cu多层膜硬度值最高,当Cu层厚度大于81nm时,Ti Al N-Cu多层膜硬度反而迅速下降,低于Ti Al N薄膜硬度。根据纳米多层结构效应,当调制层厚(λ)在纳米范围内,材料强度不遵循Hall-Petch公式,材料硬度会达到一峰值,之后随着厚度增加硬度迅速下降;而当调制层厚在微米范围内,材料强度遵循Hall-Petch公式。Cu层厚度也是影响Ti Al N-Cu多层膜力学性能的关键因素之一。当增加的Cu层厚度在纳米范围内时Ti Al N-Cu多层膜的硬度比Ti Al N薄膜有硬度优势。本实验测得Ti Al N-Cu多层膜在韧性、膜基结合强度上都高于Ti Al N薄膜。本实验还测得Ti Al N-Cu多层膜的表面粗糙度临界值。根据Ti Al N-Cu多层膜表面粗糙度与摩擦系数的关系可得到Ti Al N-Cu表面粗糙度的临界值为0.12μm,符合Svahn等人的研究结论,低于这个临界值,表面粗糙度对薄膜的摩擦系数影响不大,而高于这个临界值,表面粗糙度对薄膜的摩擦系数影响很大。本论文还研究了Ti Al N薄膜和不同Cu层厚度Ti Al N-Cu多层膜的摩擦磨损性能。研究发现不同Cu层厚度的Ti Al N-Cu多层膜有不同的结合力也有不同的磨损类型。当Cu层厚度大于108nm,Ti Al N-Cu多层膜的磨损率低于单一Ti Al N薄膜的磨损率,有更好的耐磨性。根据涂层膜基结合力的高低对应着不同的摩擦副和磨损类型可知:结合力最高硬度值最低的Ti Al N-Cu多层膜有着最低摩擦系数和磨损率,对应粘着磨损;结合力与硬度值居中的Ti Al N-Cu多层膜属于疲劳磨损类型;而结合力较低硬度值最高的Ti Al N-Cu多层膜有着最高的摩擦系数和磨损率,对应三体磨粒磨损;而Ti Al N薄膜由于其表面脱落的Ti Al N硬质颗粒以及低的结合力所以磨痕属于磨粒磨损和粘着磨损的混合磨损。通过本课题的研究,通过适当加入Cu层中间层可以改变单一Ti Al N薄膜机械性能。当Cu层厚度在纳米尺寸内,Ti Al N-Cu多层膜的硬度增高。Cu层厚度在100nm范围的Ti Al N-Cu多层膜的膜基结合力、韧性以及耐磨性要远远好于单一的Ti Al N薄膜。这对以后实际生产和机械领域中的应用,比如刀具、模具及切削工具等部件使用,有很好的利用和参考价值,以及对研究多层膜的结构和性能有重要的研究价值。
[Abstract]:In traditional hard films, Ti Al N has been replaced by Ti N thin films because of its high hardness, high temperature oxidation resistance (800 degree) and high temperature thermal stability (up to 1470 degrees C), and is widely used in cutting tools, dies and cutting tools in mechanical industry. Because of its excellent plasticity and ductility, Cu is often added to the film to improve the comprehensive performance of the film. In order to improve the comprehensive mechanical properties of N thin films Ti Al Cu, this paper with different thickness in Ti Al N in the film, study the role of Cu in the Ti Al N-Cu layer in the multilayer film, and compared with the Ti Al N film, film based film hardness, bonding strength, toughness and wear resistance is whether increased. In order to reveal the toughening mechanism and wear resistance of multi-layer films, the effects of different thickness of Cu layer on the mechanical properties and friction and wear properties of Ti Al N-Cu multilayer films were studied, and the influence of the thickness of Cu layer on the comprehensive properties of multilayer films was theoretically analyzed. In this study, the BY-DH-4A type multi arc ion plating equipment was used to prepare the deposited film. First, the optimum parameters for the deposition of Ti Al N film were tested. Ti Al N-Cu multilayer films were prepared by alternating deposition of Ti Al alloy targets and Cu magnetic filter targets. In order to improve the adhesion force of the film substrate, a thin layer Ti Al transition layer was added between the substrate and the film. Selection of experimental parameters: pulse voltage is -100V, the target current is 90A, Ti Al N-Cu multilayer film deposition, deposition of Ti Al N in N2 discharge conditions, the working pressure is 0.5Pa, the deposition of Cu layer in Ar discharge conditions, the working pressure is 0.3Pa, the Ti Al N-Cu multilayer films prepared for the three film the structure, Cu as the middle layer. Through experimental research and theoretical analysis, the multilayer membrane structure can affect the residual stress inside the film, and further affect the mechanical properties of the film, such as the hardness and the adhesion strength of the film. This paper studies on the mechanical properties of Ti Al N films and different thickness of Cu layer Ti Al N-Cu multilayers show that when the thickness of Cu layer in 81nm, Ti Al N-Cu multilayer film hardness is highest, when the Cu layer thickness is greater than 81nm, the Ti Al N-Cu multilayer film hardness but decreased rapidly, is lower than the hardness of Ti Al N films. According to the multilayer structure effect, when the modulation layer thickness (lambda) in the range of nanometer materials, strength does not follow the Hall-Petch formula, the hardness of the material will reach a peak, then decreased rapidly with the increasing thickness of hardness; and when the modulation layer thickness in the micrometer range, the strength of the material follows the Hall-Petch formula. The thickness of Cu layer is also one of the key factors affecting the mechanical properties of Ti Al N-Cu multilayer. The hardness of the Ti Al N-Cu multilayer film is better than that of the Ti Al N film when the thickness of the increased Cu layer is in the nanometer range. In this experiment, the Ti Al N-Cu multilayer film is higher than the Ti Al N film in the toughness and bond strength of the membrane. The critical value of the surface roughness of the Ti Al N-Cu multilayer film is also measured in this experiment. According to the Ti Al N-Cu multilayer film surface roughness and friction coefficient of the relationship can be Ti Al N-Cu the critical value of surface roughness of 0.12 m, with the conclusion of Svahn et al, below the critical value of surface roughness has little effect on the film friction coefficient, and higher than the critical value, the surface roughness has great influence the degree of the film coefficient of friction. The friction and wear properties of Ti Al N films and Ti Al N-Cu multilayer films with different Cu layer thickness are also studied in this paper. It is found that Ti Al N-Cu multilayer films with different thickness of Cu layer have different binding forces and different wear types. When the thickness of Cu layer is greater than that of 108nm, the wear rate of Ti Al N-Cu multilayer film is lower than that of single Ti Al N film, and it has better wear resistance. According to the coating adhesion level of the corresponding side friction and wear type shows different binding force: the highest hardness Ti Al N-Cu multilayer film has the lowest friction coefficient and the wear rate is the lowest, the corresponding adhesive wear; a combination of strength and hardness of Ti Al N-Cu multilayer film center belongs to the type of fatigue wear and adhesion; low hardness Ti Al N-Cu multilayer film has the highest friction coefficient and wear rate of the highest, the corresponding abrasive wear; and the Ti Al N film because of its Ti Al N off the surface of hard particles and low adhesion so worn are abrasive wear and adhesive wear mixed wear. Through the study of this subject, the mechanical properties of single Ti Al N film can be changed by proper addition of the middle layer of the Cu layer. When the thickness of the Cu layer is in the nanoscale size, the hardness of the Ti Al N-Cu multilayer film is increased. The bonding force, toughness and wear resistance of the Ti Al N-Cu multilayer with the thickness of Cu layer in the 100nm range are much better than that of a single Ti Al N film. This will be of great value for future production and application in mechanical field, such as cutting tools, dies and cutting tools, and has important research value for studying the structure and performance of multilayers.
【学位授予单位】：燕山大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG174.4

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本文编号：1342717