激光间接冲击下钛箔的微成形特性

发布时间：2018-01-27 23:50

本文关键词： 激光冲击间接冲击飞片微成形钛箔贴模性厚度减薄　出处：《光学精密工程》2015年03期 　论文类型：期刊论文

【摘要】：采用具有高应变率加载特征的激光驱动飞片间接冲击微成形技术对钛箔进行了微成形实验,以解决难成形材料的微塑性成形问题。从飞片完整性、工件贴模性以及厚度减薄率等方面探究了该工艺的成形性能。实验中采用微细电火花和曲面研磨技术制造微模具,材料为AISI 1090模具钢,飞片为20μm的钛箔,成形工件为35μm的钛箔。通过KEYENCE VHX-1000C超景深显微系统对飞片和工件进行了观测和分析,结果显示:飞片具有较好的完整性,能够提供均匀的冲击压力;成形后的工件具有良好的表面质量和贴模性。借助冷镶嵌工艺测量了工件的厚度分布,分析了工件厚度减薄率,其最大值为19.8%,最小值为2%,显示工件的厚度分布比较均匀。研究表明:激光间接冲击微成形技术对于难成形材料具有良好的成形效果并且能有效抑制厚度减薄。
[Abstract]:In order to solve the problem of micro-plastic forming of difficult materials, the indirect impact microforming technology of laser-driven flyer with high strain rate loading was used to solve the problem of micro-plastic forming of titanium foil. The formability of the process was investigated from the aspects of workpiece sticking property and thickness thinning rate. Micro EDM and curved surface grinding technology was used to fabricate the micro die in the experiment, which was made of AISI 1090 die steel. Titanium foil with 20 渭 m flyer and titanium foil with 35 渭 m forming workpiece were observed and analyzed by KEYENCE VHX-1000C hyperfield depth microscopy system. The results show that the flyer has good integrity and can provide uniform impact pressure. The thickness distribution of the workpiece is measured by cold mosaic process, and the workpiece thickness thinning rate is analyzed. The maximum value is 19.8and the minimum value is 2%. The results show that the thickness distribution of the workpiece is uniform. The results show that the laser indirect impact microforming technology has good forming effect on the hard materials and can effectively restrain the thickness thinning.
【作者单位】：江苏大学机械工程学院;
【基金】：国家自然科学基金资助项目(No.51175235) 江苏省自然科学基金资助项目(No.BK2012712) 江苏省高校自然科学基金资助项目(No.13KJB460003) 江苏大学学生科研立项资助项目(No.13A606)
【分类号】：TG665
【正文快照】： 1引言随着现代科学技术的发展,产品微型化已经成为一个趋势,特别是随着微系统技术(MST)和微机电系统(MEMS)的发展,微器件在航空航天、生物医学、通讯、电子、精密仪器等领域的应用越来越广泛[1-3]。目前,微器件制造存在效率低、成本高、操作难度大、材料限制等问题,因此开发和

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