微结构表面非共振椭圆振动车削

发布时间：2018-02-19 21:22

本文关键词： 微结构表面椭圆振动柔性铰链表面形貌金刚石车削　出处：《吉林大学》2015年硕士论文　论文类型：学位论文

【摘要】：近年来，由于微结构表面在光学、生物医学和机械电子等领域的广泛应用，其高效率、低成本、多样化的加工方法也相应成为国内外制造行业的研究热点。综合考虑现有的制造技术来看，椭圆振动切削方法不仅能够在很大程度上改善材料的加工性能，而且可以实现微结构表面的高精度创成，具有很大的发展潜力。目前为止，国内关于运用椭圆振动车削加工微结构表面的研究还存在一些问题，如切削装置的布局设计、微结构表面形貌的多样化加工方法等。本学位论文致力于结合创新的微结构表面椭圆振动加工方法，设计一种新型非共振椭圆振动切削装置，并通过仿真分析和离线测试加以验证，最终实现无规则微结构特征表面的端面车削。本文首先通过分析椭圆振动加工表面形貌的生成规律，提出了一种随机化椭圆轨迹振幅加工无规则微结构表面的新方法，并通过表面形貌仿真验证了其理论可行性。在切削进行装置设计时，通过两种运动轴布局的对比分析，选择了两个运动轴平行布置的布局方式，采用压电叠堆作为驱动元件，以柔性铰链作为导向机构，将生成的运动传递至刀座部分，最终在金刚石刀具处合成椭圆振动。确定装置布局后，依据实验需要，对柔性铰链部分进行了尺寸参数的理论计算和仿真分析。完成切削装置的加工装配后，选用Newport气浮隔振台、PMAC多轴运动控制器、Siemens工控机、电容式位移传感器、信号发生器等设备搭建测试系统，对装置进行了多项离线性能测试，得到其静刚度测试结果与设计值和仿真值相近，为46.33N/μm，固有频率测试结果与仿真值相比有所降低，为807Hz，满足实验要求。阶跃响应测试结果验证了装置具有良好的动态性能，正弦响应测试反映了装置在不同工况下对正弦激励信号的响应情况良好，随后分别合成了运动输出端的椭圆轨迹，结果表明可以满足椭圆振动加工需要。在使用所设计的加工装置进行无规则微结构特征表面的椭圆振动端面车削时，首先根据实验方案确定了相关切削参数，然后通过在线切削实验验证了装置的可加工性和上述振幅随机化的椭圆振动加工方法的有效性，并参照控制变量法设计对比实验，从加工方式、振动频率、进给速度、椭圆轨迹位姿、工件材料五个角度分别分析了各参数对微结构表面质量的影响。具体表现为：振幅随机化的椭圆轨迹车削方法与传统车削和常规椭圆振动车削相比可以有效弱化加工表面微结构的规律性分布，，而为了获得高质量的无规则微结构特征表面，可以适当增加切削装置的椭圆振动频率，减小进给速度，保持水平的椭圆轨迹位姿。
[Abstract]:In recent years, due to the wide application of microstructural surfaces in optical, biomedical, mechanical and electronic fields, it has high efficiency and low cost. Considering the existing manufacturing technology, the elliptical vibration cutting method can not only improve the machining performance of materials to a great extent, but also become the research hotspot of manufacturing industry at home and abroad. It has great potential for development. Up to now, there are still some problems in the research of machining micro-structure surface by using elliptical vibration turning, such as the layout design of cutting device. This dissertation is devoted to the design of a new type of non-resonant elliptical vibration cutting device combined with the innovative machining method of elliptical vibration on the surface of microstructures. Simulation analysis and off-line test are used to verify that the end surface turning of irregular micro-structure feature surface is realized. In this paper, a new method of random elliptical trajectory amplitude machining for irregular microstructural surfaces is proposed by analyzing the generating law of surface morphology in elliptical vibration machining. The theoretical feasibility is verified by surface topography simulation. In the design of the device, the parallel layout of the two moving axes is selected, and the piezoelectric stack is used as the driving element through the comparative analysis of the layout of the two moving axes. Using the flexure hinge as the guiding mechanism, the generated motion is transferred to the tool holder, and finally the elliptical vibration is synthesized at the diamond tool. After determining the layout of the device, according to the need of the experiment, The theoretical calculation and simulation analysis of the dimension parameters of the flexure hinge are carried out. After finishing the machining and assembling of the cutting device, the multi-axis motion controller of Newport air floatation vibration isolator and the capacitive displacement sensor are selected. The signal generator and other equipment set up the test system, and carried on many off-line performance tests to the device. The static stiffness test results are close to the design value and the simulation value, is 46.33 N / 渭 m, and the natural frequency test result is lower than the simulation value. The results of step response test show that the device has good dynamic performance, and the sinusoidal response test shows that the device has good response to sinusoidal excitation signal under different working conditions. The elliptical trajectories at the output end of the motion are synthesized, and the results show that the elliptical vibration machining can be satisfied. When using the designed machining device to lathe the elliptical vibration end face of the irregular microstructural characteristic surface, the relevant cutting parameters are first determined according to the experimental scheme. Then the machinability of the device and the validity of the above mentioned method are verified by the on-line cutting experiment, and the comparative experiment is designed according to the control variable method. The machining mode, vibration frequency and feed speed are analyzed. The position and orientation of the elliptical track, The influence of parameters on the surface quality of microstructures is analyzed from five angles of workpiece material. The results show that the elliptical trajectory turning method with amplitude randomization can be effectively weakened compared with traditional turning and conventional elliptical vibration turning. The regular distribution of the microstructure of the machined surface, In order to obtain a high quality irregular microstructural feature surface, the elliptical vibration frequency of the cutting device can be increased appropriately, the feed speed can be reduced, and the horizontal elliptical locus position can be maintained.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG51

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