间距可调节双线电火花线切割薄片加工技术研究

发布时间：2018-03-14 15:26

本文选题：薄切片翘曲　切入点：双线电火花线切割　出处：《哈尔滨工业大学》2015年硕士论文　论文类型：学位论文

【摘要】：近年来,随着智能终端、便携式计算机、移动通信及军事电子技术对硬件要求微型化的发展,切割出高质量薄尺寸的基片与封装切片成为目前加工制造业的难题。在该方面,多线切割(线锯)是目前比较主流的技术,但相比而言,具有诸多优势的电火花线切割加工技术因其非接触加工的特点,加工的切片,尤其是脆硬材料切片,具有表面质量好、损伤层厚度薄、成品率高的优点。然而该工艺方法除了效率问题外,切割较薄切片时切片易翘曲变形导致的加工质量难控问题严重阻碍了其进一步推广和应用。因此如何减小切片翘曲度、提高加工精度及其切割加工效率是本文的研究重点。本文首先针对薄切片的翘曲现象进行了单线电火花线切割观察实验,研究了脉冲放电能量、工件厚度及切片厚度等加工参数对切片翘曲度的影响。在完成对脉冲放电能量、脉冲放电通道半径、模型热源分析的前提下,针对单双线电火花线切割加工这两种不同加工工艺对加工薄切片的影响进行了仿真建模,并分析了两种加工条件下加工材料的温度与内部应力分布云图的差异及二者与加工切片翘曲程度的关系。基于前面的研究,设计制造了一套双线电火花线切割的丝间距调节装置,并在原有电火花机床工作台本体上搭建了间距可调节双线电火花线切割加工系统,该装置成功实现了通过调节丝间距来控制加工切片厚度的目标。针对单线切割过程中加工切片厚度低于120μm时翘曲严重的问题,进行了单双线薄切片加工对比实验,结果显示本系统可以控制厚度120μm以下加工切片的翘曲变形。为了解决多线电火花线切割精度的问题,本文以双线切割为研究对象,通过分析其精度的影响因素,建立了双线电火花线切割加工切片切槽模型,研究了丝间距调节精度、运丝速度、电极丝张力、冲液等因素对加工切片厚度误差的影响,通过手动调节补偿,可将切片误差控制在5μm内。本文最后进行了单双线切割效率的对比实验,结果显示双线切割的效率可较单线时提高79.8%,后续实验中通过采集放电波形,统计放电状态,对效率提高的原因以及峰值电流、脉宽、脉间等电参数对放电状态的影响规律进行了分析。
[Abstract]:In recent years, with the development of intelligent terminal, portable computer, mobile communication and military electronic technology, cutting high quality and thin size substrates and packaging chips has become a difficult problem in the current manufacturing industry. Multi-wire cutting (wire saw) is the mainstream technology at present, but in contrast, the WEDM technology, which has many advantages, has good surface quality because of its non-contact processing characteristics, especially the brittle hard material slice. The damage layer has the advantages of thin thickness and high yield. However, in addition to the efficiency problem, The difficult control of the processing quality caused by the easy warping and deformation of slicing when cutting thin slice seriously hinders its further popularization and application. Therefore, how to reduce the warpage of slice, Improving machining accuracy and cutting efficiency is the focus of this paper. Firstly, the single wire EDM observation experiment is carried out for the warpage phenomenon of thin slice, and the pulse discharge energy is studied. The effect of machining parameters such as workpiece thickness and slice thickness on the warpage of the chip is obtained. On the premise of the analysis of pulse discharge energy, pulse discharge channel radius and model heat source, The effects of two different machining processes on the processing of thin slice were simulated and modeled. The difference between temperature and internal stress distribution of processing material and the relationship between them and the degree of warping of processing slice are analyzed. This paper designs and manufactures a set of wire spacing adjusting device for two-wire WEDM, and sets up a two-wire WEDM system on the original EDM worktable body, which can adjust the distance between EDM and EDM. The device has successfully realized the goal of controlling the thickness of processing slice by adjusting the spacing of wire. Aiming at the serious warpage problem of processing slice thickness less than 120 渭 m in the process of single wire cutting, a contrast experiment of single and double wire thin slice processing has been carried out. The results show that the system can control the warpage deformation of the slice below 120 渭 m thickness. In order to solve the problem of the precision of multi-wire WEDM, this paper takes the double-wire cutting as the research object, and analyzes the influencing factors of the precision. The cutting slot model of two-wire WEDM was established, and the effects of wire spacing adjustment accuracy, wire speed, wire tension and flushing on slice thickness error were studied, which were compensated by manual adjustment. The slice error can be controlled within 5 渭 m. Finally, a comparative experiment on the efficiency of single and double wire cutting is carried out. The results show that the efficiency of double wire cutting is 79.8% higher than that of single wire. In the subsequent experiments, the discharge waveform is collected and the discharge state is counted. The effect of peak current, pulse width and inter-pulse electric parameters on the discharge state is analyzed.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG484

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