应用四轴联动磁流变机床加工曲面

发布时间：2018-04-04 14:21

本文选题：光学制造　切入点：磁流变抛光　出处：《光学精密工程》2015年10期

【摘要】：以永磁型磁流变抛光机为基础,提出了在光栅式加工轨迹下结合四轴联动机床(不含抛光轮转动轴)和变去除函数实现磁流变抛光技术确定性加工曲面的方法。讨论了曲面上光栅式加工轨迹等面积规划原则和基于矩阵乘积运算的驻留时间求解算法。分析了磁流变四轴联动机床的机械补偿方式,同时以变去除函数模型为基础从算法上实现了机械的剩余补偿。应用以氧化铈为抛光粉的水基磁流液对口径为80mm、曲率半径为800mm的BK7材料凸球面进行了修形验证实验,一次加工(5.5min)后显示:面形误差分布峰谷值(PV)和均方根值(RMS)从117.47nm和22.78nm分别收敛到60.80nm和6.28nm。实验结果表明:结合四轴联动的低自由度机床和变去除函数算法补偿的磁流变加工工艺能够有效地实现球面及低陡度非球面等曲面的高效确定性加工,为磁流变抛光在光学制造中的应用提供了有力的支持。
[Abstract]:On the basis of permanent magnet magnetorheological polishing machine, a method to realize the deterministic machining surface of magneto-rheological polishing technology by combining four-axis linkage machine tool (without polishing wheel rotation axis) and variable removal function under the grating machining path is proposed.The principle of equal area planning for grating machining track on a curved surface and the algorithm for solving dwell time based on matrix product operation are discussed.The mechanism compensation method of magneto-rheological four-axis linkage machine tool is analyzed, and the residual compensation of the machine is realized on the basis of the variable removal function model.An experiment was carried out to verify the shape of the convex spherical surface of BK7 material with diameter of 80 mm and radius of curvature of 800mm by using water based magnetic fluid with cerium oxide as polishing powder.It is shown that the surface error distribution peak / valley value and root-mean-square value (RMS) converge from 117.47nm and 22.78nm to 60.80nm and 6.28 nm, respectively.The experimental results show that the magneto-rheological machining process, which combines the four-axis linkage machine tool and variable removal function compensation, can effectively realize the highly efficient and deterministic machining of surfaces such as spherical surface and low steep aspherical surface.It provides a powerful support for the application of magnetorheological polishing in optical manufacturing.
【作者单位】：中国科学院长春光学精密机械与物理研究所;中国科学院大学;
【基金】：国家自然科学基金资助项目(No.61036015)
【分类号】：TG66

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