负偏压对多弧离子镀TiN涂层大颗粒形貌及像素分布的影响

发布时间：2018-04-12 09:27

本文选题：多弧离子镀 + Ti　；参考：《表面技术》2015年11期

【摘要】：目的分析不同负偏压下Ti N涂层表面的大颗粒数量、尺寸和面积以及像素分布,为多弧离子镀技术的工业化应用提供基础数据。方法采用多弧离子镀膜技术,以脉冲负偏压为变量,在硬质合金表面沉积Ti N涂层。用扫描电子显微镜对涂层表面形貌进行表征,并利用Image J软件对表面大颗粒的数量和尺寸进行分析,对像素分布进行统计。结果随着负偏压的增加,涂层表面大颗粒的数量先增多,后减少。负偏压为100 V时,大颗粒数量最多,为1364;负偏压为300 V时,大颗粒数量最少,为750。此外随着负偏压的增加,大颗粒所占涂层面积比逐渐减小。未加负偏压时,涂层表面大颗粒所占面积比最大,为6.9%,且此时涂层的力学性能最差;采用400 V负偏压时,涂层表面大颗粒所占面积比最小,为3.3%,且此时涂层的力学性能最好。负偏压为300 V时,亮、暗像素点的个数最多,为8302;负偏压为400 V时,亮、暗像素点的个数最少,为4067。结论当占空比为30%,沉积时间为1 h,负偏压为400 V时,获得的涂层力学性能最好,颗粒数量少且尺寸小。
[Abstract]:Aim to analyze the number, size, area and pixel distribution of large particles on the surface of tin coating under different negative bias voltages, so as to provide basic data for the industrial application of multi-arc ion plating technology.Methods Ti N coating was deposited on cemented carbide surface with pulse negative bias voltage as variable by multi-arc ion plating technique.The surface morphology of the coating was characterized by scanning electron microscope (SEM), and the number and size of large particles on the surface were analyzed by Image J software, and the pixel distribution was analyzed.Results with the increase of negative bias voltage, the number of large particles on the coating surface increased first, then decreased.When the negative bias voltage is 100 V, the number of large particles is the most, 1364, and the number of large particles is the least when the negative bias voltage is 300 V, which is 750.In addition, with the increase of negative bias voltage, the coating area ratio of large particles decreases gradually.When the negative bias voltage is not applied, the area ratio of the large particles on the coating surface is the largest, which is 6.9, and the mechanical properties of the coating are the worst at this time, and when the negative bias voltage is 400 V, the area ratio of the large particles on the coating surface is the smallest, which is 3.3, and the mechanical properties of the coating are the best.When the negative bias voltage is 300 V, the maximum number of bright and dark pixels is 8302, and the number of bright and dark pixels is 40677.When the negative bias voltage is 400 V, the number of bright and dark pixels is the least.Conclusion when the duty cycle is 30, the deposition time is 1 h and the negative bias voltage is 400 V, the mechanical properties of the coating are the best, the number of particles is small and the size is small.
【作者单位】：四川理工学院材料与化学工程学院;
【基金】：四川省教育厅项目(15ZA0232) 四川理工学院科研培育项目(2014PY10)~~
【分类号】：TG174.444

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