基于聚焦光针干涉和共焦成像的多功能表面形貌测量系统

发布时间：2018-07-29 19:47

【摘要】：表面形貌对零件的耐磨、配合等性能都有很大的影响,表面形貌测量和分析评定对提高产品质量、控制加工过程有着至关重要的作用。目前大部分的表面形貌测量仪器测量方法单一,存在不可避免的缺陷。本文基于聚焦光针干涉和共焦显微成像两种测量方法,研制了一台非接触多功能表面形貌测量系统,能够满足不同工程表面形貌的测量需要。本文的主要工作如下:1、研究了基于聚焦光针干涉和共焦显微成像的表面形貌测量方法,对测量性能和影响因素进行了分析。聚焦光针干涉测量方法的横向分辨率为1.3μm,纵向分辨率为5nm;共焦显微成像测量方法的横向分辨率为0.5μm,纵向分辨率为1.5μm,垂直方向测量范围为40μm。2、研制了多功能表面形貌测量系统,对测量系统的关键部件进行了设计。测量传感器集聚焦光针和共焦显微成像于一体,测量光路基于Linnik干涉显微结构,调节遮光挡板的开合即可转换两种测量方式。设计了三维驱动系统,垂直驱动系统采用压电陶瓷驱动柔性铰链实现纳米级位移,光栅计量系统实时计量位移,垂直位移分辨率1nm,行程为40μm;水平驱动由共运动平面的二维精密工作台实现,其分辨率0.2μm,测量范围为30mm×30mm。3、对垂直驱动系统和二维精密工作台的使用性能进行了实验测试和性能分析。使用Agilent5519B双频激光干涉测量仪测量了二维精密工作台的定位精度、直线度,以及垂直驱动系统的定位精度。实验结果表明驱动系统能够满足测量系统的要求。4、设计了测量评定软件系统,对测量系统的性能进行了测试和验证,并对典型的样品进行了测量。实验结果表明,测量系统能够应用于一般工程表面的表面粗糙度测量。
[Abstract]:The surface morphology has a great influence on the wear resistance and coordination of the parts. The surface morphology measurement and analysis and evaluation are very important to improve the product quality and control the processing process. At present, most of the measurement methods of surface topography measurement instruments are single, and there are inevitable defects. In this paper, a non-contact multifunctional surface topography measurement system is developed based on focusing light needle interference and confocal microimaging, which can meet the needs of different engineering surface topography measurement. The main work of this paper is as follows: 1. The measurement methods of surface topography based on focused light pin interference and confocal microimaging are studied, and the measuring properties and influencing factors are analyzed. The transverse resolution and longitudinal resolution of focused photoneedle interferometry are 1.3 渭 m and 5 nm respectively. The transverse resolution of confocal microscopy is 0.5 渭 m, the vertical resolution is 1.5 渭 m, and the vertical measurement range is 40 渭 m.2.A multifunctional surface topography measurement system has been developed. The key components of the measurement system are designed. The measurement sensor integrates focused light needle and confocal microscopic imaging. The measurement path is based on the Linnik interference microstructure and the opening and closing of the shading baffle can be changed by adjusting the opening and closing of the light shield. The three-dimensional drive system is designed. The vertical drive system uses piezoelectric ceramic to drive the flexure hinge to realize the nanometer displacement, and the grating measurement system can measure the displacement in real time. The vertical displacement resolution is 1 nm, the stroke is 40 渭 m, and the horizontal drive is realized by a two dimensional precision worktable with a common moving plane. The resolution is 0. 2 渭 m, and the measurement range is 30mm 脳 30 mm. 3. The performance of the vertical drive system and the two dimensional precision worktable is tested and analyzed experimentally. The positioning accuracy, straightness and the positioning accuracy of the vertical drive system of the two-dimensional precision worktable are measured by using the Agilent5519B dual-frequency laser interferometer. The experimental results show that the drive system can meet the requirements of the measurement system. A software system is designed to test and verify the performance of the measurement system and to measure the typical samples. The experimental results show that the system can be used to measure the surface roughness of general engineering surface.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG84

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