在位砂轮表面形貌测量系统精密位移工作台的优化设计
发布时间：2018-10-24 16:36
【摘要】：砂轮表面三维形貌的准确测量对工件表面质量的有效预测和控制极为重要。在目前砂轮离线测量中,需要砂轮从磨床上拆卸后重新定位测量,不仅可能改变原有的基准面和基准点,影响测量位置和测量精度,而且拆卸过程也增加了从在位到离线定位工作。为了获得在位砂轮表面形貌参数,从而获得更为准确地砂轮全寿命表面形貌变化过程,需研制在位检测系统。然而为了实现这一功能,一方面需要检测系统具备多自由度精确运动功能,以适应系列尺寸砂轮的表面检测,另一方面还需要该系统在光学系统的光轴方向实现亚微米级的精确定位。这些要求都为在位检测设备的研制提出新的挑战。本论文针对测量砂轮表面形貌的白光垂直扫描测量系统和景深层析测量系统集成测量平台,旨在设计测量精密位移工作台,从功能需求和精度需求上分析研究在位精密位移工作台整体方案的布局,重点分析位移导向设计及关键部件的选型分析,以及工作台主体结构的有限元分析和优化,最后进行实验测试验证。主要研究工作包括:(1)从工作台的检测应用背景分析,提出所设计工作台的功能需求及工作台技术指标。研究在位精密位移工作台整体方案的设计以及测量系统控制策略的实现。完成工作台位移结构的导向设计,针对关键部件导轨、丝杆、步进电机、压电陶瓷微定位平台以及光栅计量反馈部件进行选型分析,通过装配尺寸链计算推导主要装配部位相关零件加工尺寸公差,并指导加工。(2)对运动机构关键运动自由度进行有限元参数化优化设计。完成精密位移工作台主体结构Z向立柱的有限元分析,分析立柱承受负载所允许最大变形位移量容许值,对立柱结构改进和优化,提升了立柱的结构性能,优化后的最大变形位移量为5.62μm,且固有频率基频与优化前相比提升了20.5%,立柱结构的可靠性得到保证。同时完成精密位移工作台的关键连接件结构静力学分析,判断结构的合理性和可行性。(3)加工制作了在位精密位移工作台物理样机并进行测试验证,包括工作台位移定位精度测试评定、位移直线度测试评定,经实验测定,实现X方向定位精度达到4.50μm,Y方向定位精度达到6.97μm,Z方向粗级定位精度达到5.87μm,精级定位精度为0.08μm。且各轴直线度也达到了检测系统测量要求。通过论文的理论分析和实验研究,验证了在位砂轮表面形貌测量系统精密位移工作台满足砂轮测量的要求。
[Abstract]:It is very important for the effective prediction and control of the surface quality of the grinding wheel to accurately measure the 3D surface topography of the grinding wheel. In the current off-line measurement of grinding wheel, it is necessary for the grinding wheel to be removed from the grinding machine and then repositioned for measurement. It is not only possible to change the original datum and datum point, but also to affect the measuring position and measuring precision. And the disassembly process also increases the work from on-line to off-line positioning. In order to obtain the surface morphology parameters of in-situ grinding wheel and obtain more accurate change process of the surface morphology of the grinding wheel throughout its lifetime, an in-situ detection system should be developed. However, in order to realize this function, on the one hand, it is necessary for the detection system to have the function of accurate motion of multiple degrees of freedom, so as to adapt to the surface detection of grinding wheel of series size. On the other hand, it is necessary for the system to realize the accurate positioning of sub-micron in the optical axis direction of the optical system. These requirements pose new challenges for the development of in-situ testing equipment. In this paper, the white light vertical scanning measuring system and the depth of field measurement system integrated measuring platform are used to measure the surface morphology of grinding wheel. The purpose of this paper is to design a precision displacement measuring table. In this paper, the layout of the overall scheme of the in-situ precision displacement table is analyzed from the aspects of function requirement and precision requirement, and the design of displacement orientation and the selection of key components, as well as the finite element analysis and optimization of the main structure of the table are analyzed. Finally, the experimental test is carried out. The main research works are as follows: (1) the functional requirements and technical specifications of the designed workbench are put forward by analyzing the background of the workbench detection and application. The design of the overall scheme of the precision displacement table and the realization of the control strategy of the measurement system are studied. The guide design of the displacement structure of the worktable is completed, and the selection and analysis of the guide rail, the wire rod, the stepping motor, the piezoelectric ceramic micro-positioning platform and the grating metering feedback parts are carried out. Through the calculation of assembly dimension chain, the machining dimension tolerance of the main assembly parts is deduced, and the machining is guided. (2) the finite element parameterized optimization design of the key kinematic degrees of freedom of the motion mechanism is carried out. The finite element analysis of the Z-direction column of the main structure of the precision displacement table is completed, and the allowable maximum deformation displacement of the column under load is analyzed. The structure of the column is improved and optimized, and the structural performance of the column is improved. The maximum deformation displacement after optimization is 5.62 渭 m, and the fundamental frequency of the natural frequency is 20.55.The reliability of the column structure is guaranteed. At the same time, the structural statics analysis of the key connectors of the precision displacement table is completed to judge the rationality and feasibility of the structure. (3) the physical prototype of the in-situ precision displacement table is manufactured and tested and verified. The results show that the accuracy of X-direction positioning is 4.50 渭 m / y and that of Z direction is 5.87 渭 m and 0.08 渭 m respectively, and the precision of X direction is 4.50 渭 m ~ (-1) 渭 m ~ (-1), which is 5.87 渭 m in Z direction and 0.08 渭 m in precision level. The straightness of each axis also meets the requirement of measuring system. Through theoretical analysis and experimental study, it is verified that the precision displacement table of in-situ grinding wheel surface topography measurement system can meet the requirements of grinding wheel measurement.
【学位授予单位】：华侨大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TG580.2
，
本文编号：2291927
[Abstract]:It is very important for the effective prediction and control of the surface quality of the grinding wheel to accurately measure the 3D surface topography of the grinding wheel. In the current off-line measurement of grinding wheel, it is necessary for the grinding wheel to be removed from the grinding machine and then repositioned for measurement. It is not only possible to change the original datum and datum point, but also to affect the measuring position and measuring precision. And the disassembly process also increases the work from on-line to off-line positioning. In order to obtain the surface morphology parameters of in-situ grinding wheel and obtain more accurate change process of the surface morphology of the grinding wheel throughout its lifetime, an in-situ detection system should be developed. However, in order to realize this function, on the one hand, it is necessary for the detection system to have the function of accurate motion of multiple degrees of freedom, so as to adapt to the surface detection of grinding wheel of series size. On the other hand, it is necessary for the system to realize the accurate positioning of sub-micron in the optical axis direction of the optical system. These requirements pose new challenges for the development of in-situ testing equipment. In this paper, the white light vertical scanning measuring system and the depth of field measurement system integrated measuring platform are used to measure the surface morphology of grinding wheel. The purpose of this paper is to design a precision displacement measuring table. In this paper, the layout of the overall scheme of the in-situ precision displacement table is analyzed from the aspects of function requirement and precision requirement, and the design of displacement orientation and the selection of key components, as well as the finite element analysis and optimization of the main structure of the table are analyzed. Finally, the experimental test is carried out. The main research works are as follows: (1) the functional requirements and technical specifications of the designed workbench are put forward by analyzing the background of the workbench detection and application. The design of the overall scheme of the precision displacement table and the realization of the control strategy of the measurement system are studied. The guide design of the displacement structure of the worktable is completed, and the selection and analysis of the guide rail, the wire rod, the stepping motor, the piezoelectric ceramic micro-positioning platform and the grating metering feedback parts are carried out. Through the calculation of assembly dimension chain, the machining dimension tolerance of the main assembly parts is deduced, and the machining is guided. (2) the finite element parameterized optimization design of the key kinematic degrees of freedom of the motion mechanism is carried out. The finite element analysis of the Z-direction column of the main structure of the precision displacement table is completed, and the allowable maximum deformation displacement of the column under load is analyzed. The structure of the column is improved and optimized, and the structural performance of the column is improved. The maximum deformation displacement after optimization is 5.62 渭 m, and the fundamental frequency of the natural frequency is 20.55.The reliability of the column structure is guaranteed. At the same time, the structural statics analysis of the key connectors of the precision displacement table is completed to judge the rationality and feasibility of the structure. (3) the physical prototype of the in-situ precision displacement table is manufactured and tested and verified. The results show that the accuracy of X-direction positioning is 4.50 渭 m / y and that of Z direction is 5.87 渭 m and 0.08 渭 m respectively, and the precision of X direction is 4.50 渭 m ~ (-1) 渭 m ~ (-1), which is 5.87 渭 m in Z direction and 0.08 渭 m in precision level. The straightness of each axis also meets the requirement of measuring system. Through theoretical analysis and experimental study, it is verified that the precision displacement table of in-situ grinding wheel surface topography measurement system can meet the requirements of grinding wheel measurement.
【学位授予单位】：华侨大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TG580.2
，
本文编号：2291927
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