磁控溅射沉积BC_x薄膜的摩擦学性能

发布时间：2019-03-17 15:26

【摘要】：探索具有优良摩擦学性能的BCx薄膜的制备方法具有重要意义,文中采用闭合场非平衡磁控溅射碳化硼靶和石墨靶(纯度均为99.9%)的方法,在38CrMoAl齿轮钢和Si(100)表面沉积BCx薄膜,利用场发射扫描电子显微镜(FESEM)、原子力显微镜(AFM)、拉曼光谱、纳米压入仪、CSM摩擦磨损试验机和X射线光电子能谱仪(XPS)分别分析了BCx薄膜的结构特征、力学性能和摩擦磨损性能,得到了石墨靶电流对碳化硼薄膜结构和性能的影响规律。结果表明:相同的沉积时间内,BCx薄膜的厚度随石墨靶电流的增加逐渐增大,硬度、弹性模量逐渐降低,微观形貌的柱状结构特征越来越明显;增加石墨靶电流可以提高BCx薄膜的摩擦学性能,当石墨靶电流为2.4A时,BCx薄膜的摩擦因数稳定在0.2左右,且具有最佳的耐磨性能。
[Abstract]:It is of great significance to explore the preparation methods of BCx thin films with excellent tribological properties. The methods of closed field unbalanced magnetron sputtering boron carbide target and graphite target (purity 99.9%) are used in this paper. BCx thin films were deposited on the surface of 38CrMoAl gear steel and Si (100). The (AFM), Raman spectra of field emission scanning electron microscope (FESEM),) atomic force microscope (AFM) and nano-indenter were used. The structural characteristics, mechanical properties and friction and wear properties of BCx thin films were analyzed by CSM friction and wear tester and X-ray photoelectron spectroscopy (XPS), respectively. The effects of graphite target current on the structure and properties of boron carbide films were obtained. The results show that the thickness of BCx films increases gradually with the increase of graphite target current, the hardness and elastic modulus decrease gradually, and the columnar structure of micro-morphology becomes more and more obvious in the same deposition time. The tribological properties of BCx film can be improved by increasing the current of graphite target. When the current of graphite target is 2.4A, the friction coefficient of BCx film is about 0.2, and it has the best wear resistance.
【作者单位】：中国科学院兰州化学物理研究所固体润滑国家重点实验室;
【基金】：国家自然科学基金(51322508,51305433)
【分类号】：TG174.4

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