硬盘盘片表面缺陷检测装置光学系统设计

发布时间：2018-05-15 18:53

本文选题：光学设计 + 表面散射模型　；参考：《长春理工大学》2012年硕士论文

【摘要】：根据光的散射理论可知,当光照射粗糙表面时会发生散射现象。本文利用氩离子激光器作为光源,将其发出的光束通过激光整形系统后变成椭圆光,然后用其照射待检盘片表面。由于盘片表面疵病的作用而发生散射现象,通过分析散射光和反射光便可以得到被测盘片表面的特性。文中从散射角和散射光能量两个方面,讨论了光学设计软件ZEMAX中的四种散射模型,再结合硬盘盘片表面疵病的粗糙度等级,从中选择了一种合适的模型来反映盘片表面的散射情况,然后利用光学设计软件ZEMAX设计了该检测装置的光学系统。从而可以根据对光电倍增管和光电位置传感器接收到的光能的分析,实现对盘片表面疵病大小和位置的判断。
[Abstract]:According to the scattering theory of light, the scattering phenomenon will occur when the light is irradiated on the rough surface. In this paper, an argon ion laser is used as the light source, and the beam is transformed into elliptical light through the laser shaping system, and then the surface of the disk is irradiated with it. The scattering phenomenon occurs due to the effect of the defect on the surface of the disk, and the scattering is analyzed by analyzing the scattering. Light and reflected light can get the characteristics of the surfaces of the tested discs.
In this paper, from two aspects of scattering angle and scattered light energy, four kinds of scattering models in the optical design software ZEMAX are discussed. Then a suitable model is selected to reflect the scattering of the disk surface by combining the roughness of the surface defects of the disk disk. Then the optical design software ZEMAX is used to design the optics of the detection device. Based on the analysis of light energy received by photomultiplier tube and photoelectric position sensor, the defect size and location of disc surface can be judged.

【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：TP274;TP333.35

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