四自由度压电微夹钳的结构设计及尺寸参数优化

发布时间：2018-01-08 00:10

本文关键词：四自由度压电微夹钳的结构设计及尺寸参数优化　出处：《纳米技术与精密工程》2016年01期 　论文类型：期刊论文

【摘要】：为提高微夹钳操作微对象时的灵活性,探索四自由度压电微夹钳的实现问题,将制成相应形状并分割驱动电极的两片压电陶瓷晶片进行粘结,制作出微夹钳,并将两组空间垂直交叉的横向逆压电效应作用于钳指上,使单个钳指产生夹持方向和垂直于夹持方向的微位移,从而使整个微夹钳(两个钳指)具有4个自由度.在综合考虑微夹钳输出位移、固有频率、制作工艺的情况下,采用有限元分析方法,对钳指长度、宽度、厚度进行了优化,对优化后微夹钳的输出位移和振型进行了分析.对微夹钳的输出位移进行了测试,结果表明:在60 V的最高驱动电压作用下,左、右两钳指沿夹持方向的最大位移分别为25.6μm、24.3μm,沿垂直于夹持方向的最大位移分别为32.1μm、30.9μm;两钳指的输出位移具有良好的重复性.
[Abstract]:In order to improve the operation of the micro micro gripper object flexibility, discuss four DOF piezoelectric micro gripper, made the corresponding shape and segmentation of the driving electrode two piezoelectric ceramic wafer bonding, produce microgripper, and two sets of vertical cross transverse inverse piezoelectric effect on finger clamp so, a single clamp to produce clamping direction and the direction perpendicular to the clamp to micro displacement, so that the micro gripper (two finger clamp) has 4 degrees of freedom. In considering the micro gripper output displacement, natural frequency, production process, using the finite element analysis method, refers to the length of forceps the width, thickness is optimized, the optimized micro gripper output displacement and vibration are analyzed. The output displacement of the microgripper was tested. The results show that: in the maximum driving voltage of 60 V, left, right two clamp refers to maximum displacement along the clamping direction The maximum displacement in the direction perpendicular to the clamping direction is 32.1 mu m and 30.9 m respectively. The output displacement of two finger is good repeatability, respectively. The maximum displacement in the direction perpendicular to the clamping direction is 32.1 mu m and 30.9 m respectively.

【作者单位】：宁波大学机械工程与力学学院;首信自动化信息技术有限公司;
【基金】：国家自然科学基金资助项目(51175271) 浙江省高等学校中青年学科带头人学术攀登计划资助项目(pd2013091)
【分类号】：TH122
【正文快照】： 微夹钳作为微装配和微操作系统中的关键执行器,对于将微传感器、微执行器、微电机等装配成微机电系统(MEMS)的微装配任务,以及生物工程中对细胞的捕捉、搬运、释放等微操作任务的完成,是必不可少的[1].按驱动方式的不同,微夹钳主要分为形状记忆合金(SMA)式、静电式、电热式和

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