流体动压超光滑加工关键工艺参数优化

发布时间：2017-12-26 22:06

本文关键词：流体动压超光滑加工关键工艺参数优化　出处：《国防科技大学学报》2017年04期 　论文类型：期刊论文

【摘要】：流体动压超光滑加工材料去除主要受工件表面流体动压和剪切分布的影响,根据材料去除的理论模型分析了影响材料去除的关键工艺参数。基于流体动力学仿真和具体实验对抛光轮浸没深度、抛光轮转速和抛光轮间隙对流体动压超光滑加工的材料去除速率的影响规律进行了研究。分析结果表明:抛光轮的浸没深度对材料去除速率影响不大;材料去除速率随着抛光轮转速的减小、抛光间隙的增大而减小;考虑实际使用条件,最优抛光轮转速为300 r/min、抛光间隙为25μm、抛光轮浸没深度为(2/3)R。同时对抛光头温度稳定性进行了具体实验测试,其在装置启动后4 h基本达到热平衡,通过试运行预热的方式可有效避免温升变化对抛光间隙的影响。
[Abstract]:The material removal of hydrodynamic super smooth machining is mainly affected by the hydrodynamic pressure and shear distribution of the workpiece surface. Based on the theoretical model of material removal, the key process parameters affecting material removal are analyzed. Based on fluid dynamics simulation and specific experiments, the influence of the depth of polishing wheel, the speed of polishing wheel and the clearance of polishing wheel on the material removal rate of fluid dynamic super smooth machining is studied. The analysis results show that: the removal rate has little effect on the material immersion depth of the polishing wheel; material removal rate decreases with the decrease of polishing wheel speed, polishing gap increases; considering the actual conditions of the optimal polishing speed is 300 r/min, polishing wheel clearance is 25 mu m, throwing light immersion depth (2/3) for R. At the same time, the temperature stability of polishing head was tested in detail. It basically reached the heat balance at 4 h after startup, and the effect of temperature rise on polishing clearance can be effectively avoided through trial run preheating.
【作者单位】：国防科技大学指挥军官基础教育学院;国防科技大学机电工程与自动化学院;
【基金】：国家自然科学基金资助项目(61505259)
【分类号】：O35;TB30
【正文快照】： 现代光学技术的发展对光学元件表面质量的要求不断提高。以极紫外光刻技术为例,不仅要求光学元件的表面粗糙度达到原子级水平,同时还要求表面无任何缺陷近乎晶格完美。然而,传统的以塑性域范围内材料去除为主的超光滑表面加工方法虽然容易在一定程度上获得较低的表面粗糙度,但

【相似文献】