多波长表面干涉测量中的形貌拼接算法研究

发布时间：2018-01-25 15:17

本文关键词： 多波长表面形貌形貌拼接 ICP算法　出处：《湖北工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：在微机电系统快速发展的今天,各行业对微小结构的加工精度要求逐渐提高,往往需要获得对微表面表面轮廓信息。总的来看微机电系统在尺寸方面具有毫米级和微米级的特点,对此在进行微表面形貌测量时应同时满足大尺寸、高分辨率的特点。本文在对三维形貌拼接的方法和多波长干涉测量方法研究的基础上,设计了多波长表面形貌的干涉测量系统,通过控制二维平移台的移动,实现两两相邻的形貌图像之间具有较好的重合区域来进行拼接。从而获得大尺寸、空间高分辨率的完整三维形貌图像。本文主要完成的内容有:(1)针对三维形貌图像数据的获取,讨论了相移干涉测量、双波长干涉测量和多波长干涉测量的原理并且分析了它们的优缺点,从而引出了本文采用的多波长干涉与相移扫描相结合的形貌测量方法。(2)依据现有的干涉测量系统,为获得大尺寸高分辨率的三维表面形貌,引入了二维平移台控制系统,搭建了多波长表面形貌干涉测量系统,并且分析了系统结构的组成。介绍了在本文拼接算法研究中需要的二维平移台控制系统主要包括二维平移台、驱动电机、运动控制卡等。(3)研究了目前关于三维形貌的拼接方法,分析了在多波长干涉测量系统下测量的三维形貌的误差来源来寻找合适的三维形貌图像的拼接方法,将传统的ICP算法进行改进并且给出了本文三维形貌的拼接方法及具体步骤。(4)用搭建的多波长表面形貌干涉测量系统进行量实验。分别使用方波多刻线样板、正弦波多刻线样板进行形貌恢复的实验,并计算其Ra的值与中国计量院的结果相比,相对误差分别为4.03%和4.16%,表明了本文的多波长表面形貌干涉测量系统的可行性。并且研究了重合区域的选取对拼接后形貌图像的影响。
[Abstract]:With the rapid development of MEMS, the machining precision of micro structure has been gradually improved in various industries. It is often necessary to obtain the profile information of the micro surface. Generally speaking, the micro electromechanical system has the characteristics of millimeter and micron in size, which should be satisfied with the large size in the measurement of the micro surface topography at the same time. The characteristics of high resolution. Based on the research of 3D topography splicing method and multi-wavelength interferometry method, a multi-wavelength surface topography interferometry system is designed, which can control the movement of two-dimensional translation platform. It is realized that there is a good overlap region between the two adjacent morphologies to be spliced to obtain the large size. The main content of this paper is: 1) aiming at the acquisition of 3D image data, phase shift interferometry is discussed. The principle of dual-wavelength interferometry and multi-wavelength interferometry are analyzed and their advantages and disadvantages are analyzed. Therefore, the method of multi-wavelength interferometry combined with phase-shift scanning is introduced in this paper. According to the existing interferometric measurement system, 3D surface topography with large size and high resolution is obtained. The control system of two-dimensional translation platform is introduced, and a multi-wavelength surface topography interferometry system is built. And the composition of the system structure is analyzed. The control system of the two-dimensional translation platform which is needed in the research of the splicing algorithm in this paper is mainly composed of the two-dimensional translation platform and the driving motor. Motion control card, etc.) the present methods of 3D morphology stitching are studied. The error source of 3D topography measured in multi-wavelength interferometry system is analyzed to find a suitable method of 3D image stitching. The traditional ICP algorithm is improved and the stitching method of 3D topography and its concrete steps are given. The multi-wavelength surface topography interferometry system was used to carry out quantitative experiments. Square wave multi-line template was used respectively. The experiment of the shape recovery of sinusoidal multi-line template is carried out, and the relative errors of Ra are 4.03% and 4.16%, respectively, compared with the results of the Chinese Institute of Metrology. The feasibility of the multi-wavelength surface topography interferometry system is demonstrated, and the influence of the coincidence region on the stitched image is studied.
【学位授予单位】：湖北工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH-39;TP391.41

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