激光辐照CCD温度场与热应力场的研究

发布时间：2018-01-04 02:06

本文关键词：激光辐照CCD温度场与热应力场的研究　出处：《激光技术》2017年03期 　论文类型：期刊论文

【摘要】：为了研究了激光与CCD传感器的作用过程及损伤机理,采用有限元分析的方法,对波长1.06μm的连续激光辐照行间转移型面阵CCD进行了理论分析和仿真研究。以基底Si表面激光辐照区域为热源建立热力耦合模型,模拟得出了CCD的温度分布和热应力分布。通过对比分析其组成材料的温度损伤和应力损伤所发生的时间,发现应力损伤先于温度损伤。结果表明,作为固定边界和自由边界的交汇处,基底Si下表面边缘处热应力于激光作用0.1s时最先超过破坏阈值120MPa,发生应力破坏;Si材料产生由下表面边缘向中心的滑移,基底逐步脱离固定;激光作用0.3s时,遮光Al膜与SiO_2膜层也因热应力超过两种材料的附着力100MPa,而产生沿径向由内向外的Al膜层剥落的应力破坏行为,这种行为将加快基底Si材料的滑移,最终致使整个CCD因脱离工作位置而失效。该研究成果为CCD传感器的激光损伤及防护提供了理论依据。
[Abstract]:In order to process and damage mechanism of laser and CCD sensor, using finite element analysis method, transfer area CCD continuous laser irradiation of wavelength 1.06 m lines were theoretically analyzed and simulated. On the basis of Si by laser irradiation area as the heat source to establish thermal mechanical coupling model, the temperature distribution and heat CCD the simulation of stress distribution. Through the comparative analysis of the composition of the material and temperature damage should occur damage time, it is found that the stress damage precedes temperature damage. The results show that as the intersection of fixed boundary and free boundary, at the edge of the surface thermal stress in Si substrate laser 0.1s more than the first failure the threshold 120MPa, the stress damage; Si material slip from the edge to the center of the lower surface of the substrate, gradually from the fixed laser; the role of the 0.3s, Al film and SiO_2 film shading due to thermal stress is more than two The adhesion of 100MPa materials, and along the radial direction from the inside to the outside of the Al film peeling stress failure behavior, this behavior will accelerate the basal slip of Si material, resulting in the entire CCD position. From failure due to the results of this study provide a theoretical basis for the laser damage and the protection of the CCD sensor.

【作者单位】：北京航空航天大学仪器科学与光电工程学院;
【分类号】：TN249;TP212
【正文快照】： 引言随着光电技术的发展,CCD作为一种图像传感器,以其体积小、数字化、速度快、寿命长等优点[1],已成为电视跟踪、光电成像、光电观瞄等系统的重要组成部分。由于CCD是一种弱光成像器件,在受到激光光源辐照时,一方面激光使CCD光敏单元的光电转换达到饱和,使成像受到干扰;另一

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