快速稳定的白光干涉测量法

发布时间：2018-05-07 08:35

本文选题：测量 + 白光干涉法　；参考：《激光与光电子学进展》2017年05期

【摘要】：为了减少白光干涉法的采样数据和计算成本,提高测量速度,提出了一种快速稳定的白光干涉测量方法。根据白光干涉显微镜模型,对光学干涉法的数学模型进行了推导分析,确定了干涉光强函数与包络函数之间的关系。在此基础上,提出利用加大采样间隔的离散采样点的希尔伯特变换函数提取干涉信号包络算法,并基于采样原理分析确定了符合算法的采样间隔条件。通过仿真实验对该算法的有效性进行了验证。实际样品的白光干涉光强信号存在直流(DC)偏置噪声,影响快速白光干涉测量法的稳定性,因此采用中值滤波法消除背景噪声,分析滤波后干涉光强包络的质量。通过白光干涉显微镜装置进行了实际样品白光干涉图像采集,并对不同倍率采样间隔重构的三维表面形貌图进行比较。结果表明,该快速算法重构三维形貌的速度相比传统方法提高了20倍,同时增强了稳定性。
[Abstract]:In order to reduce the sampling data and computational cost of the white light interferometry and improve the measuring speed, a fast and stable white light interferometry method is proposed. According to the white light interference microscope model, the mathematical model of optical interference method is deduced and analyzed, and the relationship between the interference intensity function and the envelope function is determined. On this basis, the Hilbert transform function of the discrete sampling points with increasing sampling interval is used to extract the envelope of interference signal, and the sampling interval condition is determined based on the sampling principle. The effectiveness of the algorithm is verified by simulation experiments. The DC bias noise exists in the white light intensity signal of the sample, which affects the stability of the fast white light interference measurement method. Therefore, the median filtering method is used to eliminate the background noise, and the quality of the interference intensity envelope after filtering is analyzed. The white light interference image was collected by the white light interference microscope, and the 3D surface morphologies reconstructed by different sampling intervals were compared. The results show that the speed of reconstruction is 20 times faster than that of the traditional method, and the stability is enhanced.
【作者单位】：上海理工大学光电信息与计算机工程学院;
【基金】：国家重大科研仪器专项(2012YQ170004)
【分类号】：O436.1

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