基于偏振混叠的氦氖激光器纳米测尺系统

发布时间：2018-06-26 10:19

本文选题：位移测量 + 正交偏振　；参考：《激光与红外》2017年08期

【摘要】：提出一种基于偏振混叠的氦氖激光器纳米测尺系统,将双折射元件插入He-Ne激光器谐振腔内产生频率分裂,使激光器变成了频差可调的双频激光器。运用频率分裂、模竞争、双纵模功率调谐等激光物理效应,使用偏振混叠方法和设定浮动阈值,研制了新型的激光器纳米测尺。以激光波长为尺子,具有可溯源性,在没有任何电细分的条件下达到了纳米量级的分辨率,与激光干涉仪的比对实验表明,该系统的分辨率为79nm,量程为20 mm,线性度为5.8×10~(-5),标准差为520nm。
[Abstract]:A novel He-Ne laser nanometer system based on polarization aliasing is proposed. The birefringent element is inserted into the resonator of He-Ne laser to produce frequency splitting, which makes the laser become a dual-frequency laser with adjustable frequency difference. Using laser physical effects such as frequency splitting, mode competition and dual longitudinal mode power tuning, a new type of laser nanometer is developed by using polarization aliasing method and setting floating threshold. With the laser wavelength as the ruler, it has traceability and achieves nanometer resolution without any electrical subdivision. The comparison experiment with the laser interferometer shows that, The system has a resolution of 79 nm, a range of 20 mm, a linearity of 5.8 脳 10 ~ (-5) and a standard deviation of 520 nm.
【作者单位】：南通大学机械工程学院;北京航空航天大学仪器科学与光电工程学院;
【基金】：国家自然科学基金项目(No.61475082) 国家重大仪器专项(No.2011YQ04013603) 北京市科委项目(No.Z151100002415027)资助
【分类号】：TN248

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