硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析

发布时间：2018-10-08 19:46

【摘要】：空间分辨率和聚焦效率是X射线微纳探针最关键的技术指标。压弯非球面镜具备聚焦效率高、空间分辨好、加工难度低、色散消除等优点。基于上海光源硬X射线微聚焦及应用线站的现有条件,在精确压弯理论的基础上设计了高精度柔性铰链压弯机构并进行了有限元分析,并且进一步对压弯镜体宽度进行了优化。通过长程面形仪(Long Trace Profiler,LTP)对压弯机构的测试,得到压弯非球面镜的斜率误差为430 nrad,理论上可实现230 nm的硬X射线聚焦光斑。
[Abstract]:Spatial resolution and focusing efficiency are the key technical parameters of X-ray microprobe. Bending non-spherical mirror has the advantages of high focusing efficiency, good spatial resolution, low processing difficulty and dispersion elimination. Based on the existing conditions of hard X-ray microfocus of Shanghai light source and the application of line station, a high-precision flexure hinge bending mechanism is designed based on the accurate bending theory, and the finite element analysis is carried out, and the body width of the bending mirror is further optimized. By measuring the bending mechanism with (Long Trace Profiler,LTP), it is found that the slope error of the bending non-spherical mirror is 430 nrad,. In theory, the hard X-ray focusing spot of 230 nm can be realized.
【作者单位】：中国科学院上海应用物理研究所嘉定园区;中国科学院大学;Advanced
【基金】：国家自然科学基金(No.U1332120)资助~~
【分类号】：O434.19

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