移栅型全息光栅曝光干涉条纹锁定

发布时间：2018-10-08 21:27

【摘要】：为了提高全息光栅曝光系统的曝光对比度,抑制外部环境变化引起的曝光干涉条纹漂移,提出了一种移栅型干涉条纹锁定方法。采用分束光栅实现光源激光的分光及干涉条纹的相位调整。通过叠栅条纹间接测量干涉条纹相位变化,给出了双光电探测器的最佳探测位置。结合分光及相位调整功能,给出了分束光栅参数的设计方法。针对光栅曝光特点设计了控制器。从理论上对比了分束光栅与压电反射镜的相位调整性能。实验结果表明,采样频率为500Hz时,干涉条纹的低频漂移得到有效抑制,相位锁定精度达到0.13rad(3σ),即条纹漂移量低于±0.021个周期。该方法可以实时有效地锁定曝光干涉条纹,提高曝光对比度。且分束光栅偏转对条纹周期影响小,相位调整性能仅与分束光栅参数相关,便于光路设计。
[Abstract]:In order to improve the exposure contrast of the holographic grating exposure system and suppress the exposure interference fringe drift caused by the change of external environment, a grid-shifting interferometric fringe locking method is proposed. The beam splitting grating is used to realize the phase adjustment of laser beam splitting and interference fringes. The optimum detection position of double photodetectors is given by indirectly measuring the phase change of interference fringes by stacked grid fringes. The design method of the parameters of beam splitting grating is given in combination with the functions of light splitting and phase adjustment. According to the characteristic of grating exposure, the controller is designed. The phase adjustment performance of beam splitting grating and piezoelectric reflector is compared theoretically. The experimental results show that the low frequency drift of the interference fringes is effectively suppressed when the sampling frequency is 500Hz, and the phase locking accuracy is up to 0.13rad (3 蟽), that is, the fringe drift is less than 卤0.021 periods. This method can lock the exposure interference fringes in real time and improve the exposure contrast. The deflection of the beam splitting grating has little effect on the fringe period, and the phase adjustment performance is only related to the parameters of the beam splitting grating, so it is convenient to design the optical path.
【作者单位】：中国科学院长春光学精密机械与物理研究所光栅技术研究中心;中国科学院大学;
【基金】：国家自然科学基金国家重大科研仪器设备研制专项(61227901) 国家重大科学仪器设备开发专项(2011YQ120023)
【分类号】：O436.1

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