用结构色无损检测光栅占空比的初步探索

发布时间：2018-03-04 02:12

本文选题：衍射效　切入点：率　出处：《中国科学技术大学》2017年硕士论文　论文类型：学位论文

【摘要】：本论文的主要研究工作是基于严格耦合波的结构色检测光栅结构参数的方法,主要分为理论计算和多层介质膜光栅的参数测量两个部分。在快点火系统中约束着系统性能的主要参数是多层介质膜光栅的衍射效率。考虑到光栅制作工艺中图形多步转移中的不确定因素,目前缺少无损检测的手段对正式光栅制作工艺过程进行有效可靠的检测,本文的重点工作是提出了基于结构色的无损检测方法来测量光栅的参数。一、给出了基于结构色检测光栅参数的基本原理和思路,详细的介绍了严格耦合波来求解周期性结构的衍射效率的方法,分析了光源光谱和光栅衍射效率拟合成结构色的方法,给出了具体的步骤和实现代码,其中计算程序考虑了多维周期性结构和锥角衍射等因素。二、分析了光源的参数(偏振和半高宽)以及光栅的参数对结构色的影响,其中光栅的参数包括了线密度,栅线高度,占空比,光栅形貌等等。给出的结论包括:光栅线密度在1740线每毫米时,对应的结构色对线密度变化不敏感;光栅栅线高度在300nm左右时,较小的栅线高度可以引起结构色较大的改变。三、给出了线密度为1740线每毫米的多层介质膜光栅的占空比检测实验结果,分别在显微镜测量系统和光谱仪测量系统中进行了讨论。给出了显微镜测量系统中测量占空比的绝对误差在13%到20%和光谱检测系统中测量占空比的绝对误差在3%到20%。本文的研究结果表明,基于结构色检测光栅占空比的方法可行,但是存在一定的误差。在文章的后续工作中给出了今后改进的方向。
[Abstract]:The main research work of this thesis is the method of structure color detection of grating structure parameters based on strictly coupled wave. It is mainly divided into two parts: theoretical calculation and parameter measurement of multilayer dielectric film grating. The main parameter constraining the system performance in the fast ignition system is the diffraction efficiency of the multilayer dielectric film grating. The uncertain factors in multi-step transfer, At present, there is a lack of the means of nondestructive testing for the effective and reliable detection of the formal grating fabrication process. The key work of this paper is to propose a nondestructive testing method based on structure color to measure the parameters of the grating. In this paper, the basic principle and train of thought of grating parameters based on structural color detection are given. The method of calculating diffraction efficiency of periodic structure by strictly coupled wave is introduced in detail, and the method of light source spectrum and diffraction efficiency of grating to synthesize structure color is analyzed. The specific steps and implementation codes are given, in which the multi-dimensional periodic structure and cone angle diffraction are taken into account in the calculation program. Secondly, the influence of the parameters of the light source (polarization and half maximum width) and the parameters of the grating on the structure color is analyzed. The grating parameters include linear density, grating height, duty cycle, grating morphology and so on. The conclusions are as follows: when the grating linear density is 1740 lines per millimeter, the corresponding structure color is not sensitive to the change of linear density; When the grating gate height is about 300nm, the smaller grating height can cause a great change in structure color. Third, the duty cycle of the multilayer dielectric film grating with a linear density of 1740 lines per millimeter is obtained. It is discussed in microscope measurement system and spectrometer measurement system respectively. The absolute error of duty cycle measured in microscope measurement system is 13% to 20%, and absolute duty cycle error in spectrum detection system is 3%. The results of this paper show that, The method of detecting the duty cycle of grating based on structure color is feasible, but there are some errors. In the following work of this paper, the direction of improvement is given.
【学位授予单位】：中国科学技术大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN25

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