脉冲射流对大气压射频辉光放电过程的时空辅助研究

发布时间：2018-06-01 20:11

本文选题：射频辉光放电 + 等离子体射流　；参考：《东华大学》2017年硕士论文

【摘要】：近年来大气压等离子体射流因其设备成本低廉,在材料处理、生物医学领域、废水处理等方面都有广泛应用。大气压等离子体射流相比于其它等离子体放电形式,具有温度低、放电装置简易、化学活性强等优点。因此成为当前等离子体基础和应用研究领域热点方向之一。本文提出将脉冲放电射流与射频放电相结合,将脉冲放电射流产生的活性粒子引入到射频放电中,辅助射频放电过程以及脉冲调制射频放电的起辉过程。首先,研究脉冲放电射流对连续射频放电的影响,采用在连续射频放电中引入高压脉冲放电,研究这种新型放电形式的电流电压特性;脉冲放电射流与射频放电强度的时空分布;放电强度的时间分辨,揭示组合电极结构的放电过程。深入研究射频放电区域的放电空间结构时空分布与放电强度时间分辨,确定脉冲放电射流对射频放电的影响。其次,研究脉冲放电射流对脉冲调制射频放电起辉过程的影响。将脉冲放电引入脉冲调制射频放电的关闭阶段,通过改变施加脉冲电压以及与射频电压之间的时间间隔,得到四种放电情况下放电空间结构时空演变过程与放电强度时间分辨,揭示脉冲放电射流产生的活性粒子对射频放电的起辉作用。最后,利用COMSOL进行数据模拟,模拟结果再次验证了脉冲放电产生各种活性粒子辅助了射频放电的起辉,而且发现脉冲放电和射频放电时间间隔越短,射频起辉至稳定放电之间的时间变短。这提供了一种降低射频电压情况下,增强射频放电强度的大气压辉光放电技术。
[Abstract]:In recent years, atmospheric pressure plasma jet has been widely used in material treatment, biomedical field, wastewater treatment and so on because of its low cost. Compared with other plasma discharge modes, atmospheric pressure plasma jet has the advantages of low temperature, simple discharge device and strong chemical activity. Therefore, it has become one of the hotspots in the research field of plasma foundation and application. In this paper, the pulse discharge jet is combined with the radio frequency discharge, and the active particles generated by the pulse discharge jet are introduced into the radio frequency discharge to assist the radio frequency discharge process and the pulse modulation radio frequency discharge process. Firstly, the influence of pulse discharge jet on continuous RF discharge is studied. The current and voltage characteristics of this new type of discharge are studied by introducing high voltage pulse discharge into continuous RF discharge. The temporal and spatial distribution of the pulse discharge jet and the radio frequency discharge intensity and the time resolution of the discharge intensity reveal the discharge process of the composite electrode structure. The temporal and spatial distribution of the discharge spatial structure and the time resolution of the discharge intensity in the radio frequency discharge region are studied in detail, and the influence of the pulse discharge jet on the radio frequency discharge is determined. Secondly, the effect of pulse discharge jet on the initiation process of pulse modulated RF discharge is studied. The pulse discharge is introduced into the closing stage of pulse modulated radio frequency discharge. By changing the time interval between the applied pulse voltage and the radio frequency voltage, the temporal and spatial evolution process of the discharge spatial structure and the time resolution of the discharge intensity are obtained under the four discharge conditions. The effect of active particles produced by pulsed discharge jet on radiofrequency discharge is revealed. Finally, using COMSOL to simulate the data, the simulation results show that the pulse discharge produces a variety of active particles to aid the radiofrequency discharge, and the shorter the time interval between the pulse discharge and the radio frequency discharge, the shorter the time between the pulse discharge and the radio frequency discharge. The time between radiofrequency initiation and steady discharge becomes shorter. This provides an atmospheric pressure glow discharge technique for increasing RF discharge intensity under the condition of reducing RF voltage.
【学位授予单位】：东华大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O53

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