激光环境散射率测量技术研究
发布时间：2018-09-05 18:49
【摘要】：在一些高精密光学检测中,例如高反射镜、超光滑光学表面的散射率的检测,一般大气环境中存在大量散射粒子,粒子的散射光会对测量结果产生一定干扰,如果检测信号非常微弱时,这样的影响将不能忽略。现阶段对环境的评估方法主要是对环境中粒子浓度进行测量,但是这些方法要么测量过程复杂,难以推广,要么对测量粒子要求苛刻,实用性不高。针对以上问题,本文设计了一种大气环境散射率测量装置,主要通过测量环境的散射率,以达到评估环境的目的。本散射率测量系统是以稳功率激光器为光源。当光束穿过存有粒子的积分球空腔时散射光被收集在积分球内,并利用光电倍增管测量收集到的散射光。系统采用锁相放大器进行信号处理,有效的去除背景噪声。测量系统主要由光源、光路、探测、数据处理等部分组成。光源部分以半导体激光器作为核心器件,设计了半导体激光器的驱动电路以及调制电路,实现了激光器功率的稳定输出和电调制;光路部分主要完成了光束的转折、衰减和杂散光消除等;探测部分完成了散射光收集,使用光电倍增管完成光电信号转换和信号放大;数据处理部分利用锁相放大器实现了相关检测技术,有效的提高了信噪比。使用单片机作为控制芯片,设计了 A/D转换及显示电路等相关辅助电路。通过上述方案,搭建了散射率测量系统,对实验室环境进行了散射率测量,并对实验数据进行了认真分析。实验表明该测量系统达到了测量1～100ppm的设计要求。实现了激光环境散射率的准确测量,且精度高、测试方便迅速、适用范围广。
[Abstract]:In some high precision optical detection, such as high reflector, the detection of scattering rate of ultra-smooth optical surface, there are a large number of scattered particles in general atmospheric environment, the scattering light of particles will produce certain interference to the measurement results. If the detection signal is very weak, this effect can not be ignored. At present, the main methods of environmental assessment are to measure the concentration of particles in the environment. However, these methods are either complicated and difficult to be popularized, or they are demanding to measure particles and are not practical. Aiming at the above problems, this paper designs a measuring device for the scattering rate of atmospheric environment, mainly by measuring the scattering rate of the environment, in order to achieve the purpose of evaluating the environment. The scattering rate measurement system is based on a stable power laser as a light source. When the beam passes through the cavity of the integrated sphere containing particles, the scattered light is collected in the integral sphere and measured by photomultiplier tube. The system uses a phase-locked amplifier for signal processing to effectively remove background noise. The measurement system is mainly composed of light source, optical path, detection, data processing and so on. In the light source part, the semiconductor laser is used as the core device, the driving circuit and modulation circuit of the semiconductor laser are designed, the stable output and electric modulation of the laser power are realized. Attenuation and stray light elimination; detection part completed the collection of scattered light, using photomultiplier tube to complete the photomultiplier signal conversion and signal amplification; the data processing part of the use of phase-locked amplifier to achieve the correlation detection technology, effectively improve the signal-to-noise ratio. Using single chip computer as control chip, the auxiliary circuits such as A / D conversion and display circuit are designed. Through the above scheme, a scattering rate measurement system is set up, the scattering rate of the laboratory environment is measured, and the experimental data are carefully analyzed. Experiments show that the system meets the design requirements of 1~100ppm measurement. The accurate measurement of laser scattering rate is realized, with high accuracy, convenient and rapid measurement and wide range of application.
【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O436.2
[Abstract]:In some high precision optical detection, such as high reflector, the detection of scattering rate of ultra-smooth optical surface, there are a large number of scattered particles in general atmospheric environment, the scattering light of particles will produce certain interference to the measurement results. If the detection signal is very weak, this effect can not be ignored. At present, the main methods of environmental assessment are to measure the concentration of particles in the environment. However, these methods are either complicated and difficult to be popularized, or they are demanding to measure particles and are not practical. Aiming at the above problems, this paper designs a measuring device for the scattering rate of atmospheric environment, mainly by measuring the scattering rate of the environment, in order to achieve the purpose of evaluating the environment. The scattering rate measurement system is based on a stable power laser as a light source. When the beam passes through the cavity of the integrated sphere containing particles, the scattered light is collected in the integral sphere and measured by photomultiplier tube. The system uses a phase-locked amplifier for signal processing to effectively remove background noise. The measurement system is mainly composed of light source, optical path, detection, data processing and so on. In the light source part, the semiconductor laser is used as the core device, the driving circuit and modulation circuit of the semiconductor laser are designed, the stable output and electric modulation of the laser power are realized. Attenuation and stray light elimination; detection part completed the collection of scattered light, using photomultiplier tube to complete the photomultiplier signal conversion and signal amplification; the data processing part of the use of phase-locked amplifier to achieve the correlation detection technology, effectively improve the signal-to-noise ratio. Using single chip computer as control chip, the auxiliary circuits such as A / D conversion and display circuit are designed. Through the above scheme, a scattering rate measurement system is set up, the scattering rate of the laboratory environment is measured, and the experimental data are carefully analyzed. Experiments show that the system meets the design requirements of 1~100ppm measurement. The accurate measurement of laser scattering rate is realized, with high accuracy, convenient and rapid measurement and wide range of application.
【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O436.2
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