平面标准镜的绝对标定技术研究
发布时间：2019-06-29 18:07
【摘要】：光学系统对光学平面面型精度的要求越来越高,对其相应的检测技术也提出了更加苛刻的要求。在光学平面检测中,传统的利用干涉仪直接对平面进行检测属于相对检测,检测精度很大程度上依赖平面标准镜面型。一般来说,其检测精度为λ/20—λ/50,而对于更高要求的检测精度则需要通过绝对检测技术实现。绝对检测技术通过对光学平面进行多次检测,能够有效的去除参考标准镜的面型影响,并还原被测平面的面型,实现高精度的面型检测。基于Zernike拟合的三平面互检法是在传统三平面互检法的基础上所建立的一种的绝对检测技术,由于其操作简便且精度较高而作为常用的绝对检测方法。该方法所还原的平面面型理论上满足纳米级绝对检测要求。在实际检测中存在着检测随机误差和系统误差。本文以基于Zernike多项式拟合三平面互检法为研究核心,针对其在检测过程中所存在的上述误差源进行分类研究。其随机误差主要包括了测量环境温度和湿度对干涉腔腔长及被测平面的误差影响,系统误差主要包括在检测过程中存在的标准平面与被测平面光轴偏离、被测平面旋转角度偏离及相对检测结果面积截取等影响。对于系统随机误差,通过研究后对纳米级绝对检测所需实验环境的温度、湿度及干涉腔腔长进行了标定;而对于系统误差,则分析了不同偏离值对于绝对检测结果的误差影响。并在进行了测量环境和绝对检测算法的标定之后,通过实验验证了系统误差对于该绝对检测技术的影响。通过理论分析及实验验证,标准平面与被测平面的光轴偏离对Zernike多项式三平面互检法检测精度的误差影响最大,此外实验环境温度、腔长设定、旋转角度偏离及相对检测结果面积截取比均对检测结果存在误差影响。为了保证纳米级精度要求,在控制实验环境温差小于0.2℃条件下将腔长设为0.02m,并需要在检测中控制光轴偏离小于2个像素,旋转角度偏离小于1°,将面积截取比设置为95%。
[Abstract]:The requirements of optical system for the accuracy of optical plane profile are getting higher and higher, and the corresponding detection technology is also put forward more stringent requirements. In optical plane detection, the traditional use of interferometer to detect the plane directly belongs to the relative detection, and the detection accuracy depends to a large extent on the plane standard mirror type. Generally speaking, the detection accuracy is 位 / 20-位 / 50, while the higher detection accuracy needs to be realized by absolute detection technology. By detecting the optical plane many times, the absolute detection technology can effectively remove the influence of the surface shape of the reference standard mirror, reduce the surface shape of the measured plane, and realize the high precision surface detection. The three-plane mutual detection method based on Zernike fitting is an absolute detection technique based on the traditional three-plane mutual detection method, which is used as a common absolute detection method because of its simple operation and high accuracy. The plane surface reduced by this method theoretically meets the requirements of nanometer absolute detection. There are random errors and systematic errors in practical detection. In this paper, the three-plane mutual detection method based on Zernike multinomial fitting is taken as the research core, and the above error sources existing in the detection process are classified and studied. The random error mainly includes the influence of measuring ambient temperature and humidity on the cavity length and the measured plane, and the systematic error mainly includes the deviation between the standard plane and the optical axis of the measured plane, the deviation of the rotation angle of the measured plane and the interception of the relative detection result area. For the random error of the system, the temperature, humidity and cavity length of the experimental environment needed for nanometer absolute detection are calibrated, while for the system error, the effects of different deviation values on the absolute detection results are analyzed. After calibrating the measurement environment and absolute detection algorithm, the influence of system error on the absolute detection technology is verified by experiments. Through theoretical analysis and experimental results, it is proved that the deviation of optical axis between the standard plane and the measured plane has the greatest influence on the detection accuracy of Zernike multinomial triplane mutual detection method. In addition, the temperature of the experimental environment, the setting of cavity length, the deviation of rotation angle and the area interception ratio of the relative detection results all have error effects on the detection results. In order to ensure the accuracy of nanometer level, the cavity length is set to 0.02m under the condition of controlling the temperature difference of the experimental environment less than 0.2 鈩，
本文编号：2508007
[Abstract]:The requirements of optical system for the accuracy of optical plane profile are getting higher and higher, and the corresponding detection technology is also put forward more stringent requirements. In optical plane detection, the traditional use of interferometer to detect the plane directly belongs to the relative detection, and the detection accuracy depends to a large extent on the plane standard mirror type. Generally speaking, the detection accuracy is 位 / 20-位 / 50, while the higher detection accuracy needs to be realized by absolute detection technology. By detecting the optical plane many times, the absolute detection technology can effectively remove the influence of the surface shape of the reference standard mirror, reduce the surface shape of the measured plane, and realize the high precision surface detection. The three-plane mutual detection method based on Zernike fitting is an absolute detection technique based on the traditional three-plane mutual detection method, which is used as a common absolute detection method because of its simple operation and high accuracy. The plane surface reduced by this method theoretically meets the requirements of nanometer absolute detection. There are random errors and systematic errors in practical detection. In this paper, the three-plane mutual detection method based on Zernike multinomial fitting is taken as the research core, and the above error sources existing in the detection process are classified and studied. The random error mainly includes the influence of measuring ambient temperature and humidity on the cavity length and the measured plane, and the systematic error mainly includes the deviation between the standard plane and the optical axis of the measured plane, the deviation of the rotation angle of the measured plane and the interception of the relative detection result area. For the random error of the system, the temperature, humidity and cavity length of the experimental environment needed for nanometer absolute detection are calibrated, while for the system error, the effects of different deviation values on the absolute detection results are analyzed. After calibrating the measurement environment and absolute detection algorithm, the influence of system error on the absolute detection technology is verified by experiments. Through theoretical analysis and experimental results, it is proved that the deviation of optical axis between the standard plane and the measured plane has the greatest influence on the detection accuracy of Zernike multinomial triplane mutual detection method. In addition, the temperature of the experimental environment, the setting of cavity length, the deviation of rotation angle and the area interception ratio of the relative detection results all have error effects on the detection results. In order to ensure the accuracy of nanometer level, the cavity length is set to 0.02m under the condition of controlling the temperature difference of the experimental environment less than 0.2 鈩，
本文编号：2508007
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