基于空间光调制技术的高速高分辨飞秒激光加工
[Abstract]:Femtosecond laser-induced two-photon polymerization is an important method of micro-nano fabrication, which is widely used in fabrication of optical devices, biosensors, micro-fluid devices and other micro-nano functional devices. However, the traditional femtosecond laser processing is based on single point by point scanning, this method is very inefficient and difficult to be widely used and practical production. In order to improve machining efficiency, parallel scanning machining method is applied to machining array structure, but this multi-focus parallel scanning processing method can only process array structure, and improve efficiency is limited. Especially in the fabrication of large-scale micro-nano devices, the processing time is still too long. Non-mask graphic machining is a method that can effectively improve the efficiency of femtosecond laser two-photon polymerization. In this paper, the focal plane light field is modulated based on spatial light modulator. This paper first studies the spatial light modulation technology, introduces the phase type and amplitude type spatial light modulator, and analyzes the modulation principle of the phase type spatial light modulator by Jones matrix method, and then introduces a variety of computational holographic algorithms. The algorithm is improved based on the practical requirements of the experiment, which lays a foundation for the further realization of the graphical light field. Based on the study of the light field of the structure, this paper presents a method for rapid fabrication of pipeline structure. The core of the method is a new ring Fresnel lens, which can focus the parallel incident light into a uniform ring focal spot. The radius of the focal spot can be changed flexibly. By changing the parameters of the annular Fresnel band plate, we can even obtain the hollow focal spot of quadrilateral, hexagonal and octagonal, and realize the rapid processing of 100% filled cell scaffold. In order to realize the fast machining of arbitrary structure, we improve the algorithm of CGH. When the traditional CGH algorithm is used to generate the graphical light field, there are a lot of speckle noises in the light field, which will lead to the deterioration of the quality of the machined structure. We propose a method of multiple exposures to average speckle noise below the exposure threshold of two-photon processing by superposing multiple holograms to make use of the random distribution of speckle noise. Through this multiple exposure method, we can obtain a high quality microstructure in hundreds of milliseconds. The Darman grating fabricated by this method has good optical properties and can save 95% processing time compared with the traditional point-by-point scanning processing method. However, we are still not satisfied with this processing efficiency. In order to achieve higher efficiency, we use amplifying stage lasers with higher energy density as the light source, and aim at the nature of amplifying stage lasers. A new computational holographic algorithm is optimized to realize the rapid processing of arbitrary micro and nano structures. The processing time of each structure is about 5 milliseconds, and at such a rapid processing efficiency, the processing time to centimeter scale is only 10 minutes. This is similar to the processing time of traditional UV lithography, but has higher flexibility, higher resolution and no mask. Based on this fast machining method, we integrate the micro-trapping structure in the centimeter-level pipeline to realize the capture function of the particles. The fabricated microfluidic devices show excellent performance in testing, which also proves the application value of this method in the rapid fabrication of microfluidic functional devices.
【学位授予单位】:中国科学技术大学
【学位级别】:博士
【学位授予年份】:2016
【分类号】:TN249
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