TFT-LCD光刻工艺有机物危害分析及控制措施研究

发布时间：2018-12-20 10:01

【摘要】：依据中国青年报社会调查中心对2062人进行的“2015年最想购买的东西”调查显示,想购买电子产品的受访者占比为41.4%,购买电子产品已成为现代社会人们的刚性需求,电子产品及其相关服务正在成为新的消费增长点。目前,我国是世界上第一大电子产品消费国,同时也是世界电子产品的制造大国,进入21世纪以来,我国在电子制造相关行业取得了一系列重大技术突破,成为全球最大的电子产品制造基地。在薄膜晶体管液晶显示器件(TFT-LCD)制造行业中,随着新工厂的不断开工建设和已建工厂生产的稳定运行,行业内开始暴露出诸多新的安全和职业健康问题。其中,尤为突出的是光刻工艺中大量使用的有机物异味问题,这些有机物极易挥发,嗅阈值极低,且主要成分在相应的职业卫生国家标准中没有规定接触限值,甚至没有国家标准规定的检测方法。多种有机物混合挥发难以界定联合危害效应,这使得不少员工开始担忧这些有机物对自身的健康影响,同时也为行业内的职业健康安全管理人员甚至是工厂领导带来了不少的困扰和压力。本文通过对国内某薄膜晶体管液晶显示器件(TFT-LCD)制造企业的有机物暴露较为严重的工艺段进行分析,评估这些有机物的成分,对其危害来源、危害性质进行分析;通过检测方法确定有机物暴露的重点分布区域,找到重点管控设备;结合洁净车间通风的特殊性、工艺流程联通的特点,对工艺中有机物异味产生源进行综合评估;通过其扩散情况制定控制措施,实现作业现场改善的目标。
[Abstract]:According to a survey of 2062 people by the China Youth Daily Social Survey Center, "what you want to buy the most in 2015" shows that 41.4 percent of the respondents want to buy electronic products. Buying electronic products has become a rigid demand in modern society, according to a survey of 2062 people by the China Youth Daily Social Survey Center. Electronic products and related services are becoming a new consumer growth point. At present, China is the largest consumer of electronic products in the world, and it is also a major manufacturing country of electronic products in the world. Since the beginning of the 21st century, China has made a series of major technological breakthroughs in electronic manufacturing related industries. Become the world's largest electronics manufacturing base. In the thin-film transistor liquid crystal display (TFT-LCD) manufacturing industry, with the continuous construction of new factories and the steady operation of the existing factories, many new safety and occupational health problems have been exposed in the industry. Among them, the problem of odor of organic compounds used in photolithography is particularly prominent. These organic compounds are volatile easily, the threshold of smell is very low, and the main components do not have a limit of exposure in the corresponding national standards of occupational hygiene. There is even no national standard for testing. Mixed volatilization of multiple organic compounds is difficult to define the combined hazard effect, which makes many employees begin to worry about the health effects of these organic compounds. At the same time, occupational health and safety managers in the industry and even factory leaders have brought a lot of trouble and pressure. In this paper, through the analysis of the serious exposure process of organic matter in a thin film transistor liquid crystal display (TFT-LCD) manufacturing enterprise in China, the composition of these organic compounds is evaluated, and the hazard source and hazard properties are analyzed. Through the detection method to determine the key distribution area of organic matter exposure, to find out the key control equipment, combined with the particularity of ventilation in clean workshop and the characteristics of technological process connection, to comprehensively evaluate the organic matter odour producing source in the process. Make control measures through its diffusion situation to achieve the goal of site improvement.
【学位授予单位】：首都经济贸易大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN873.93

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