光频梳非线性异步光学采样大尺寸绝对距离测量
发布时间：2018-07-26 10:44
【摘要】：如何在几米、几十米甚至几公里的距离上实现快速、高精度的绝对距离测量一直是计量科学和工业生产关注的热点课题,尤其在现有基于增量式测量的激光干涉仪已经不能满足科学研究及装备制造需求的情况下,研究分辨率优于1μm、测量时间小于1 s的大尺寸绝对距离测量方法及装置对我国基础科学研究和高端装备制造都具有重要意义。传统绝对距离测量方法可分为合成波长法和时间飞行法。其中合成波长法由于需要待测距离初值和多个波长来建立合成波长链,因此不适用于目标位置未知的大距离快速测量。时间飞行法虽然适用于大尺寸测量,但是受电子探测器皮秒分辨率限制,距离分辨率只能达到毫米,不能满足微米量级的测量要求。因此,本论文研究了基于异步光学采样和非线性倍频效应的脉冲时域分辨方法,将时间飞行法的时域分辨率提升至优于1 fs,对应距离分辨优于300 nm,从而满足大尺寸绝对距离测量的需求。建立了以光学频率梳作为光源的绝对距离测量系统。利用频率梳重复频率的差异进行异步光学采样,实现对脉冲的时域光学扫描,同时利用第二类相位匹配强度互相关量化脉冲重叠程度,通过倍频信号的强度反演被测脉冲的时域位置,由此实现优于1 fs的脉冲时域分辨。此外,为了克服频率梳周期脉冲特性对量程的限制,提出并行双重频测量,避免重频调节过程中待测目标位置变化引起的整周期判读错误,实现量程的可靠拓展。考虑使用的非线性效应对脉冲功率的需求,提出利用电参考代替光学参考,避免了参考臂光能量损耗,提高有效测量范围。针对大气中长距离测量折射率问题,利用基频脉冲倍频效应,对目标进行双波长并行测量,进行干燥条件近似下的空气折射率测量。使用倍频互相关探测基频脉冲时域位置,使用和频互相关探测倍频脉冲时域位置,在12.3 m距离上实现折射率10-6的修正。针对空间应用超远距离测量,提出以频率梳为光源的主动激光测距实验方法,利用设置在两站的频率梳交互测量,实现两站之间绝对距离的测量。同时,考虑两站使用不同时间基准对时间飞行测量的影响,在距离测量的同时,通过测量倍频脉冲时间间隔,实现两地之间的频率基准传递。在两站距离23 m时,距离测量残差小于400 nm,频率基准传递1 s阿伦均方差1.3×10-16,保证全系统使用同一时钟。
[Abstract]:How to achieve rapid and high precision absolute distance measurement at distances of several meters, tens of meters or even several kilometers has always been a hot topic in metrology science and industrial production. Especially when the existing laser interferometer based on incremental measurement can no longer meet the needs of scientific research and equipment manufacturing, It is of great significance for the basic scientific research and high-end equipment manufacturing in China to study the large size absolute distance measurement methods and devices with a resolution of less than 1 渭 m and a measuring time less than 1 s. Traditional absolute distance measurement methods can be divided into synthetic wavelength method and time flight method. The synthetic wavelength method is not suitable for the fast measurement of large distance with unknown target position because the initial value of the distance to be measured and multiple wavelengths are needed to establish the synthetic wavelength chain. Time flight method is suitable for large scale measurement, but limited by the picosecond resolution of electronic detector, the distance resolution can only reach millimeter, which can not meet the requirement of micron measurement. Therefore, in this paper, the pulse time-domain resolution method based on asynchronous optical sampling and nonlinear frequency-doubling effect is studied. The time-domain resolution of time-flight method is improved to be better than 1 fs and the corresponding range resolution is better than 300 nm, which meets the requirement of large size absolute distance measurement. An absolute distance measuring system with optical frequency comb as light source is established. Asynchronous optical sampling is carried out by using the difference of repetition rate of frequency comb to realize the optical scanning of pulse in time domain. At the same time, the second kind of phase matching intensity is used to quantify the overlap degree of pulse. The time-domain position of the measured pulse is inversed by the intensity of the frequency-doubling signal, and the time-domain resolution of the pulse is better than 1 fs. In addition, in order to overcome the limitation on the range caused by the periodic pulse characteristics of the frequency comb, a parallel dual frequency measurement is proposed to avoid the integer period reading errors caused by the change of the target position in the readjustment process, and to realize the reliable expansion of the measurement range. Considering the demand for the pulse power due to the nonlinear effect, it is proposed to use the electric reference instead of the optical reference to avoid the energy loss of the reference arm and to increase the effective measurement range. Aiming at the problem of measuring refractive index over long distance in atmosphere, the double wavelength parallel measurement of target is carried out by using the frequency doubling effect of fundamental frequency pulse, and the air refractive index is measured under the approximate condition of drying. The frequency doubling cross-correlation is used to detect the position of the fundamental frequency pulse in time domain and the sum frequency cross correlation is used to detect the time domain position of the frequency doubling pulse. The correction of refractive index 10-6 is realized at 12.3 m distance. An active laser ranging experiment method with frequency comb as the light source is proposed to measure the absolute distance between the two stations by using the frequency comb interactively measured in the two stations. At the same time, considering the influence of two stations using different time datum on time-flight measurement, the frequency reference transmission between the two places can be realized by measuring the frequency doubling pulse time interval while measuring the distance. When the distance between the two stations is 23 m, the distance measurement residuals are less than 400 nm, and the frequency reference transmits 1 s Aron mean deviation 1.3 脳 10 ~ (-16), which ensures the use of the same clock in the whole system.
【学位授予单位】：清华大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN249
本文编号：2145753
[Abstract]:How to achieve rapid and high precision absolute distance measurement at distances of several meters, tens of meters or even several kilometers has always been a hot topic in metrology science and industrial production. Especially when the existing laser interferometer based on incremental measurement can no longer meet the needs of scientific research and equipment manufacturing, It is of great significance for the basic scientific research and high-end equipment manufacturing in China to study the large size absolute distance measurement methods and devices with a resolution of less than 1 渭 m and a measuring time less than 1 s. Traditional absolute distance measurement methods can be divided into synthetic wavelength method and time flight method. The synthetic wavelength method is not suitable for the fast measurement of large distance with unknown target position because the initial value of the distance to be measured and multiple wavelengths are needed to establish the synthetic wavelength chain. Time flight method is suitable for large scale measurement, but limited by the picosecond resolution of electronic detector, the distance resolution can only reach millimeter, which can not meet the requirement of micron measurement. Therefore, in this paper, the pulse time-domain resolution method based on asynchronous optical sampling and nonlinear frequency-doubling effect is studied. The time-domain resolution of time-flight method is improved to be better than 1 fs and the corresponding range resolution is better than 300 nm, which meets the requirement of large size absolute distance measurement. An absolute distance measuring system with optical frequency comb as light source is established. Asynchronous optical sampling is carried out by using the difference of repetition rate of frequency comb to realize the optical scanning of pulse in time domain. At the same time, the second kind of phase matching intensity is used to quantify the overlap degree of pulse. The time-domain position of the measured pulse is inversed by the intensity of the frequency-doubling signal, and the time-domain resolution of the pulse is better than 1 fs. In addition, in order to overcome the limitation on the range caused by the periodic pulse characteristics of the frequency comb, a parallel dual frequency measurement is proposed to avoid the integer period reading errors caused by the change of the target position in the readjustment process, and to realize the reliable expansion of the measurement range. Considering the demand for the pulse power due to the nonlinear effect, it is proposed to use the electric reference instead of the optical reference to avoid the energy loss of the reference arm and to increase the effective measurement range. Aiming at the problem of measuring refractive index over long distance in atmosphere, the double wavelength parallel measurement of target is carried out by using the frequency doubling effect of fundamental frequency pulse, and the air refractive index is measured under the approximate condition of drying. The frequency doubling cross-correlation is used to detect the position of the fundamental frequency pulse in time domain and the sum frequency cross correlation is used to detect the time domain position of the frequency doubling pulse. The correction of refractive index 10-6 is realized at 12.3 m distance. An active laser ranging experiment method with frequency comb as the light source is proposed to measure the absolute distance between the two stations by using the frequency comb interactively measured in the two stations. At the same time, considering the influence of two stations using different time datum on time-flight measurement, the frequency reference transmission between the two places can be realized by measuring the frequency doubling pulse time interval while measuring the distance. When the distance between the two stations is 23 m, the distance measurement residuals are less than 400 nm, and the frequency reference transmits 1 s Aron mean deviation 1.3 脳 10 ~ (-16), which ensures the use of the same clock in the whole system.
【学位授予单位】：清华大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN249
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