激光脉宽对光学薄膜元件热损伤的影响

发布时间：2018-06-28 22:00

本文选题：激光损伤 + 光学薄膜　；参考：《激光与红外》2017年01期

【摘要】：纳秒量级及以下脉宽激光致光学薄膜元件的损伤研究持续了几十年,但纳秒量级以上脉宽却很少提及。因此,针对10 ns~1 ms量级区间不同脉宽激光辐照光学薄膜元件产生的热损伤进行了研究,计算了高反膜、增透膜和干涉滤光片三种典型光学薄膜元件的温度场分布,并分析了其激光热损伤特性。结果表明,对于长脉宽激光,热扩散深度大,薄膜损伤的电场效应被削弱,热传导效应在损伤中占据主导地位,损伤可至基底;短脉宽激光损伤对薄膜内部的电场分布更为敏感,损伤发生在温度最高值附近的膜层区域。进而开展了10 ns与1 ms脉宽激光致光学薄膜元件的损伤实验,损伤阈值及形貌特征与温度场计算结果显示的热损伤特性相符。
[Abstract]:The damage of optical thin film elements caused by nanosecond laser pulses has been studied for several decades, but the pulse width above nanosecond level is seldom mentioned. Therefore, the thermal damage caused by laser irradiation on optical thin film elements with different pulse widths in 10 ns~1 Ms region is studied. The temperature field distributions of three typical optical thin film elements, high reflection film, antireflection film and interference filter, are calculated. The characteristics of laser thermal damage are analyzed. The results show that the electric field effect of thin film damage is weakened for long pulse width laser with large thermal diffusion depth, and the thermal conduction effect plays a dominant role in the damage, and the damage can be reached to the substrate. The short pulse width laser damage is more sensitive to the electric field distribution in the film, and the damage occurs in the film area near the highest temperature. Furthermore, the damage experiments of 10 ns and 1 Ms pulse width laser induced optical thin film elements have been carried out. The damage threshold and morphologic characteristics are in agreement with the thermal damage characteristics of the calculated results of the temperature field.
【作者单位】：安徽工业大学数理科学与工程学院;南京理工大学理学院;
【基金】：江苏省自然科学基金青年基金(No.BK20130751) 安徽工业大学青年科研基金(No.QZ201515)资助
【分类号】：TN249;O484.4

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