基于图形化多层结构的铁磁薄膜高频磁特性研究
发布时间：2018-11-23 06:18
【摘要】：随着电子器件的集成化程度越来越高,设备之间的传导干扰,电磁辐射干扰引发了一系列的电磁兼容和设备可靠性问题,抗电磁干扰问题不容忽视。软磁薄膜应用于抗电磁干扰领域面临两大问题,一方面,软磁薄膜为金属薄膜,表面电阻率过低,容易导致微波阻抗失配,从而严重影响到器件的微波性能。另一方面,薄膜共振频带较窄不适用于抗电磁干扰器件宽频带的应用。本论文主要提出一种基于图形化多层结构的软磁薄膜。一方面,通过隔离层的引入,提高薄膜电阻率,在多层膜中实现高频磁响应叠加,拓宽薄膜共振频带。另一方面,通过图形化在软磁薄膜中引入形状各向异性,提高薄膜共振频率。本论文结合微磁学及磁共振损耗理论,对图形化多层薄膜进行设计及制备,分析制备出的图形化多层薄膜的磁损耗机理,旨在提高薄膜电阻率并达到“高频”、“宽带”的效果,为薄膜抗电磁干扰器件提供研究基础。主要研究工作如下:1、连续多层薄膜磁特性研究(1)制备FeCoB/SiO_2(xnm)/FeCoSiB多层薄膜,研究隔离层对多层薄膜磁特性的影响。研究结果表明,在SiO_2隔离层厚度达到7nm时,能够有效隔离FeCoB层与FeCoSiB层的耦合作用,该多层薄膜的动态磁响应能够明显地观察到独立的双共振峰。该结果表明,在多层膜中引入隔离层可以在各磁性层之间建立高频磁响应叠加模型。(2)制备FeNi/SiO_2/FeCoSiB多层薄膜和FeNi/SiO_2/FeCoB多层薄膜,研究二者磁性能。多层薄膜的动态响应均具有明显双峰,验证了隔离层在多层膜的各磁性层之间建立高频磁响应叠加模型依然适用于FeNi合金。2、连续与图形化复合多层薄膜的磁特性研究。制备FeNi/SiO_2/FeCoSiB条纹复合多层薄膜。研究表明,其微波磁谱在1.4GHz与4.8GHz具有明显的独立双峰,通过调节最上层FeCoSiB条纹薄膜的厚度可实现对第二峰位的调控。3、图形化多层薄膜的磁特性研究。制备FeCoSiB条纹多层薄膜,通过不同厚度的FeCoSiB条纹薄膜组合形成多层薄膜。研究表明,FeCoSiB条纹多层薄膜的动态响应在4.8GHz与7.5GH具有独立双峰,实现高频的共振峰拓宽。通过调节最上层FeCoSiB条纹薄膜的厚度可实现对第二峰位的调控。
[Abstract]:With the increasing integration of electronic devices, the conduction interference between devices, electromagnetic radiation interference has caused a series of electromagnetic compatibility and equipment reliability problems, the problem of anti-electromagnetic interference can not be ignored. There are two problems in the application of soft magnetic thin films in the field of electromagnetic interference. On the one hand, the soft magnetic thin films are metal films, the surface resistivity is too low, which easily leads to microwave impedance mismatch, which seriously affects the microwave performance of the devices. On the other hand, thin film resonance band is not suitable for wide band applications of electromagnetic interference devices. In this paper, a kind of soft magnetic thin film based on graphical multilayer structure is proposed. On the one hand, through the introduction of the isolation layer, the resistivity of the film is improved, the high frequency magnetic response superposition is realized in the multilayer film, and the resonance band of the film is widened. On the other hand, the shape anisotropy is introduced into the soft magnetic thin film by graphics, and the resonance frequency of the thin film is improved. Based on the theory of micromagnetics and magnetic resonance loss, the paper designs and fabricates the graphical multilayer thin films, and analyzes the magnetic loss mechanism of the graphically multilayer films. The purpose of this paper is to improve the resistivity of the films and achieve "high frequency". The effect of wideband provides a basis for the study of thin film electromagnetic interference devices. The main research work is as follows: 1. The magnetic properties of continuous multilayer thin films (1) FeCoB/SiO_2 (xnm) / FeCoSiB multilayer films were prepared and the effect of isolation layer on the magnetic properties of multilayer films was studied. The results show that the coupling interaction between FeCoB layer and FeCoSiB layer can be effectively isolated when the thickness of SiO_2 insulator layer reaches 7nm. The dynamic magnetic response of the multilayer thin film can obviously observe the independent double resonance peak. The results show that the superposition model of high frequency magnetic response can be established between the magnetic layers by introducing the isolation layer into the multilayer film. (2) the FeNi/SiO_2/FeCoSiB multilayer film and the FeNi/SiO_2/FeCoB multilayer film are prepared and their magnetic properties are studied. The dynamic response of multilayer films has obvious double peaks, which verifies that the superposition model of high frequency magnetic response between the magnetic layers of the multilayer films is still suitable for the study of magnetic properties of FeNi alloy. 2. FeNi/SiO_2/FeCoSiB fringe composite multilayer films were prepared. The results show that the microwave magnetic spectrum has two distinct peaks in 1.4GHz and 4.8GHz, and the second peak position can be adjusted by adjusting the thickness of the upper layer of FeCoSiB stripe film. 3. The magnetic properties of the graphically multilayer thin films are studied. The FeCoSiB stripe multilayer films were prepared and the multilayer films were formed by the combination of FeCoSiB stripe films with different thickness. The results show that the dynamic response of FeCoSiB stripe multilayer films has two independent peaks in 4.8GHz and 7.5GH, and the high frequency resonance peaks can be widened. The second peak position can be regulated by adjusting the thickness of the upper layer of FeCoSiB fringe film.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM271;O484
本文编号：2350582
[Abstract]:With the increasing integration of electronic devices, the conduction interference between devices, electromagnetic radiation interference has caused a series of electromagnetic compatibility and equipment reliability problems, the problem of anti-electromagnetic interference can not be ignored. There are two problems in the application of soft magnetic thin films in the field of electromagnetic interference. On the one hand, the soft magnetic thin films are metal films, the surface resistivity is too low, which easily leads to microwave impedance mismatch, which seriously affects the microwave performance of the devices. On the other hand, thin film resonance band is not suitable for wide band applications of electromagnetic interference devices. In this paper, a kind of soft magnetic thin film based on graphical multilayer structure is proposed. On the one hand, through the introduction of the isolation layer, the resistivity of the film is improved, the high frequency magnetic response superposition is realized in the multilayer film, and the resonance band of the film is widened. On the other hand, the shape anisotropy is introduced into the soft magnetic thin film by graphics, and the resonance frequency of the thin film is improved. Based on the theory of micromagnetics and magnetic resonance loss, the paper designs and fabricates the graphical multilayer thin films, and analyzes the magnetic loss mechanism of the graphically multilayer films. The purpose of this paper is to improve the resistivity of the films and achieve "high frequency". The effect of wideband provides a basis for the study of thin film electromagnetic interference devices. The main research work is as follows: 1. The magnetic properties of continuous multilayer thin films (1) FeCoB/SiO_2 (xnm) / FeCoSiB multilayer films were prepared and the effect of isolation layer on the magnetic properties of multilayer films was studied. The results show that the coupling interaction between FeCoB layer and FeCoSiB layer can be effectively isolated when the thickness of SiO_2 insulator layer reaches 7nm. The dynamic magnetic response of the multilayer thin film can obviously observe the independent double resonance peak. The results show that the superposition model of high frequency magnetic response can be established between the magnetic layers by introducing the isolation layer into the multilayer film. (2) the FeNi/SiO_2/FeCoSiB multilayer film and the FeNi/SiO_2/FeCoB multilayer film are prepared and their magnetic properties are studied. The dynamic response of multilayer films has obvious double peaks, which verifies that the superposition model of high frequency magnetic response between the magnetic layers of the multilayer films is still suitable for the study of magnetic properties of FeNi alloy. 2. FeNi/SiO_2/FeCoSiB fringe composite multilayer films were prepared. The results show that the microwave magnetic spectrum has two distinct peaks in 1.4GHz and 4.8GHz, and the second peak position can be adjusted by adjusting the thickness of the upper layer of FeCoSiB stripe film. 3. The magnetic properties of the graphically multilayer thin films are studied. The FeCoSiB stripe multilayer films were prepared and the multilayer films were formed by the combination of FeCoSiB stripe films with different thickness. The results show that the dynamic response of FeCoSiB stripe multilayer films has two independent peaks in 4.8GHz and 7.5GH, and the high frequency resonance peaks can be widened. The second peak position can be regulated by adjusting the thickness of the upper layer of FeCoSiB fringe film.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM271;O484
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相关期刊论文 前2条
1 骆俊百;余涛;艾明哲;彭斌;张万里;;磁性薄膜复数磁导率的短路微带线法测试[J];磁性材料及器件;2014年02期
2 郭铁茂;;非旋转椭圆球形磁体退磁因子新求法[J];磁性材料及器件;1992年01期
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