纳米结构类金刚石薄膜的制备及其摩擦学性能的研究
发布时间：2019-02-13 20:18
【摘要】：本文以等离子体增强化学气相沉积(PECVD)设备,利用高功率脉冲技术、恒流双极脉冲技术和液相碳源制备了纳米结构的类金刚石薄膜。考察了各种工艺参数对薄膜纳米结构的影响,探讨了薄膜纳米结构与其机械性能、摩擦学和表面特性之间的相关性。通过选择合适的参数制备系列纳米结构类金刚石薄膜。讨论了纳米结构薄膜力学性能的产生机制。同时考察了特殊纳米结构在薄膜摩擦过程中的结构演化,并进一步讨论了纳米结构对摩擦学性能的贡献机理。主要研究结果如下： 1.利用高功率PECVD制备了一类指纹状纳米结构类金刚石薄膜,考察了沉积参数对薄膜结构及性能的影响。研究表明高的等离子体能量对薄膜的纳米结构有显著的影响,并通过该方法制备出具有优异机械和摩擦学性能的纳米结构类金刚石薄膜。这种纳米结构碳基薄膜表现出优异的力学性能,如高硬度21.5GPa和高弹性(弹性回复85%)。更重要的是,薄膜在相对湿度为35%的大气环境下表现出超低摩擦系数(～0.009)。通过高分辨透射电镜的分析发现,指纹状的纳米结构在磨屑中可以稳定存在,并认为这可能是超低摩擦产生的一个主要原因。 2.利用恒流双极脉冲直流PECVD制备出纳米洋葱/非晶(COs/a-C:H)复合类金刚石薄膜。由于这种独特的碳洋葱分散在无定形基体的双重纳米结构,薄膜表现出优异的机械性能和良好的摩擦学性能。该薄膜拥有高达92%的超高弹性回复,同时在相对湿度30%的空气环境下表现出超低的摩擦系数(μ0.008)和磨损率(6.41×10-18m3/Nm)。为了更深入的理解薄膜表现出的优异摩擦学性能,利用高分辨透射电镜考察了COs/a-C:H薄膜中纳米洋葱的结构和分布演化,发现碳洋葱分子可以在磨屑中稳定存在。磨屑中的碳洋葱在微观上存在纳米滚动效应,其在摩擦过程中起到“分子滚动轴承”的作用,将滑动行为转化为滚动行为,导致产生超低的摩擦系数和磨损率 3.以环戊二烯做为碳源,在低压条件下气化,采用等离子体化学气相沉积法,在Si单晶100面上制备了富勒烯纳米团簇/非晶复合纳米结构类金刚石薄膜。利用透射电子显微镜和拉曼光谱发现,该类金刚石薄膜是多层卷曲富勒烯纳米团簇包裹在非晶基体的复合结构。结果表明,由于这种特殊的纳米结构,薄膜表现出了优异的力学和摩擦学性能。 4.研究了所制备的具有类富勒烯结构的碳基薄膜在离子液体作为润滑剂条件下的摩擦磨损性能。结果表明,含氢类富勒烯碳基薄膜在低频率摩擦时表现出减摩性能；在高频率摩擦中表现出优异的抗磨性能,磨损寿命显著提高。并用边界润滑理论对其减摩抗磨作用做了探讨。
[Abstract]:In this paper, nanocrystalline diamond-like carbon films were prepared by plasma enhanced chemical vapor deposition (PECVD) equipment, high power pulse technique, constant current bipolar pulse technique and liquid carbon source. The effects of various technological parameters on the nanostructures of the films were investigated, and the correlation between the nanostructures and their mechanical properties, tribological properties and surface properties was discussed. A series of nanocrystalline diamond-like carbon films were prepared by selecting appropriate parameters. The mechanism of mechanical properties of nanostructured films was discussed. At the same time, the structure evolution of special nanostructures in the friction process of thin films was investigated, and the contribution mechanism of nanostructures to tribological properties was discussed. The main results are as follows: 1. A kind of fingerprint nanostructured diamond-like carbon films were prepared by high power PECVD. The effects of deposition parameters on the structure and properties of the films were investigated. The results show that the high plasma energy has a significant effect on the nanostructures of the films, and the diamond like carbon films with excellent mechanical and tribological properties have been prepared by this method. The nanostructured carbon based films exhibit excellent mechanical properties such as high hardness 21.5GPa and high elasticity (elastic recovery 85%). More importantly, the thin film exhibits ultra-low friction coefficient (~ 0.009) in the atmosphere with relative humidity of 35%. Through the analysis of high resolution transmission electron microscope, it is found that the fingerprint nanostructures can exist stably in the wear debris, and it is considered that this may be one of the main causes of ultra-low friction. 2. Nanocrystalline onion / amorphous (COs/a-C:H) composite diamond-like carbon films were prepared by constant current bipolar pulsed DC PECVD. The thin films exhibit excellent mechanical properties and good tribological properties due to the unique carbon onion double nanostructures dispersed in amorphous substrates. The film has an ultra-high elastic recovery of 92% and an ultra-low friction coefficient (渭 0.008) and wear rate (6.41 脳 10-18m3/Nm) at 30% relative humidity. In order to better understand the excellent tribological properties of the films, the structure and distribution evolution of nano-onions in COs/a-C:H thin films were investigated by high-resolution transmission electron microscopy. It was found that carbon onion molecules could exist stably in the wear debris. The nano-rolling effect exists in the carbon onion in the grinding chips, which plays the role of "molecular rolling bearing" in the friction process. The sliding behavior is transformed into the rolling behavior, resulting in extremely low friction coefficient and wear rate of 3. Fullerene nanoclusters / amorphous composite diamond-like carbon films were prepared on Si single crystal by plasma chemical vapor deposition with cyclopentadiene as carbon source at low pressure. By means of transmission electron microscope and Raman spectroscopy, it is found that the diamond films are multilayer crimped fullerene nanoclusters coated in amorphous substrates. The results show that the thin films exhibit excellent mechanical and tribological properties due to the special nanostructures. 4. The friction and wear properties of carbon based films with fullerene-like structure were investigated under the condition of ionic liquid as lubricant. The results show that the hydrogen-containing fullerene-based films exhibit antifriction properties at low frequency and excellent wear resistance at high frequency friction. The antifriction and antiwear effect of the boundary lubrication theory is discussed.
【学位授予单位】：兰州理工大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TQ163;TB383.2
本文编号：2421833
[Abstract]:In this paper, nanocrystalline diamond-like carbon films were prepared by plasma enhanced chemical vapor deposition (PECVD) equipment, high power pulse technique, constant current bipolar pulse technique and liquid carbon source. The effects of various technological parameters on the nanostructures of the films were investigated, and the correlation between the nanostructures and their mechanical properties, tribological properties and surface properties was discussed. A series of nanocrystalline diamond-like carbon films were prepared by selecting appropriate parameters. The mechanism of mechanical properties of nanostructured films was discussed. At the same time, the structure evolution of special nanostructures in the friction process of thin films was investigated, and the contribution mechanism of nanostructures to tribological properties was discussed. The main results are as follows: 1. A kind of fingerprint nanostructured diamond-like carbon films were prepared by high power PECVD. The effects of deposition parameters on the structure and properties of the films were investigated. The results show that the high plasma energy has a significant effect on the nanostructures of the films, and the diamond like carbon films with excellent mechanical and tribological properties have been prepared by this method. The nanostructured carbon based films exhibit excellent mechanical properties such as high hardness 21.5GPa and high elasticity (elastic recovery 85%). More importantly, the thin film exhibits ultra-low friction coefficient (~ 0.009) in the atmosphere with relative humidity of 35%. Through the analysis of high resolution transmission electron microscope, it is found that the fingerprint nanostructures can exist stably in the wear debris, and it is considered that this may be one of the main causes of ultra-low friction. 2. Nanocrystalline onion / amorphous (COs/a-C:H) composite diamond-like carbon films were prepared by constant current bipolar pulsed DC PECVD. The thin films exhibit excellent mechanical properties and good tribological properties due to the unique carbon onion double nanostructures dispersed in amorphous substrates. The film has an ultra-high elastic recovery of 92% and an ultra-low friction coefficient (渭 0.008) and wear rate (6.41 脳 10-18m3/Nm) at 30% relative humidity. In order to better understand the excellent tribological properties of the films, the structure and distribution evolution of nano-onions in COs/a-C:H thin films were investigated by high-resolution transmission electron microscopy. It was found that carbon onion molecules could exist stably in the wear debris. The nano-rolling effect exists in the carbon onion in the grinding chips, which plays the role of "molecular rolling bearing" in the friction process. The sliding behavior is transformed into the rolling behavior, resulting in extremely low friction coefficient and wear rate of 3. Fullerene nanoclusters / amorphous composite diamond-like carbon films were prepared on Si single crystal by plasma chemical vapor deposition with cyclopentadiene as carbon source at low pressure. By means of transmission electron microscope and Raman spectroscopy, it is found that the diamond films are multilayer crimped fullerene nanoclusters coated in amorphous substrates. The results show that the thin films exhibit excellent mechanical and tribological properties due to the special nanostructures. 4. The friction and wear properties of carbon based films with fullerene-like structure were investigated under the condition of ionic liquid as lubricant. The results show that the hydrogen-containing fullerene-based films exhibit antifriction properties at low frequency and excellent wear resistance at high frequency friction. The antifriction and antiwear effect of the boundary lubrication theory is discussed.
【学位授予单位】：兰州理工大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TQ163;TB383.2
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相关期刊论文 前2条
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