晶圆制造中交货率提升的方法研究

发布时间：2018-07-05 05:44

本文选题：按时交货 + 产能模型　；参考：《复旦大学》2013年硕士论文

【摘要】：半导体晶圆制造系统是目前世界上最为复杂的制造系统之一,由于其自身的特殊性：设备数量众多、生产周期长、可再回流、设备维修的不确定性等,与传统的生产模式存在很大差异。由于半导体晶圆制造是高投资、高收益、高风险和竞争程度最为激烈的产业之一,对半导体晶圆制造生产线的建模与调度优化成为近些年来学术界和工程界研究的重点,因而具有深刻的理论意义和广泛的应用前景。本文基于6英寸半导体晶圆制造系统(Semiconductor Wafer Fabrication System)平台,结合B公司具体的项目案例,从影响按时交货率的瓶颈资源产能和生产流通周期等因素入手,通过建立晶圆制造产能计算模型来对生产资源的瓶颈与非瓶颈做到准确识别,再结合处理大规模复杂系统常用的分解方法,对瓶颈资源运用约束管理(TOC)等理论开展设备产能的持续改善、提升,继而研究和选择能使瓶颈资源产能通量进一步获得提升且兼顾交货期的组合调度方式。对于非瓶颈资源,则通过优化调度策略来有效缩短在制品的平均等待时间,加快非瓶颈资源段的在制品向瓶颈资源段的流通速度,利用调整在制品的分布结构间接实现瓶颈资源产能的再次提升。最终在保证晶圆制造产能利用率的基础上,低成本地实现了生产流通周期在瓶颈资源与非瓶颈资源上的双双下降,同时实现了按时交货率这一晶圆制造中关键绩效指标的提升。
[Abstract]:Semiconductor wafer manufacturing system is one of the most complex manufacturing systems in the world at present. Because of its particularity, such as large number of equipments, long production cycle, reflow, uncertainty of equipment maintenance, etc., semiconductor wafer manufacturing system is one of the most complex manufacturing systems in the world. There is a big difference with the traditional production mode. Because semiconductor wafer manufacturing is one of the industries with high investment, high profit, high risk and fierce competition, modeling and scheduling optimization of semiconductor wafer manufacturing line has become the focus of academic and engineering research in recent years. Therefore, it has profound theoretical significance and wide application prospect. Based on the 6-inch semiconductor wafer fabrication system and the specific project case of B Company, this paper starts with the factors such as the bottleneck resource capacity and the production and circulation cycle that affect the delivery rate on time. Through the establishment of wafer manufacturing capacity calculation model, the bottleneck and non-bottleneck of production resources can be accurately identified, and then combined with the commonly used decomposition methods to deal with large-scale complex systems, The theory of constraint management (TOC) is used to improve the capacity of the equipment, and then to study and select the combination scheduling mode which can improve the productivity flux of the bottleneck resource and give consideration to the due date. For non-bottleneck resources, the average waiting time of WIP can be effectively shortened by optimizing scheduling strategy, and the flow speed from WIP to bottleneck resource segment can be accelerated. By adjusting the distribution structure of WIP, the productivity of bottleneck resources can be improved again. Finally, on the basis of ensuring the utilization ratio of wafer manufacturing capacity, both the bottleneck and non-bottleneck resources in the production circulation cycle are reduced at low cost, and the key performance index in wafer manufacturing is improved, namely, the on-time delivery rate.
【学位授予单位】：复旦大学
【学位级别】：硕士
【学位授予年份】：2013
【分类号】：F426.6

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