半导体硅片企业MES系统研究与应用

发布时间：2018-10-09 11:12

【摘要】：随着国内经济的不断发展以及世界经济的一体化进程的不断加速,半导体硅片企业面临的竞争愈发激烈,半导体硅片企业只有不断的提高自身的制造能力和适应水平,并对客户不断变化的需求进行满足,才能够在激烈的竞争中立于不败之地。因此,半导体硅片企业需要进行MES系统(Manufacture Execute System制造执行系统)的完整解决方案的建立,以便能够使得企业获得必要的发展条件,并对信息沟通和适应能力进行提高。可以说,MES系统已经受到越来越多制造企业的关注,半导体硅片企业需要亟待建立一套符合企业特点的MES系统。本文进行MES系统的研究与应用是基于半导体硅片企业的生产实际进行的,以满足半导体硅片企业的MES管理为最终目标。本文通过分析半导体硅片企业对于MES系统要求的特殊性和必要性基础上,确立了研究的具体方向和范畴。系统的设计与实现融合了当前先进的面向对象设计、J2EE技术以及统一建模语言技术等。本文的主要研究重点和工作主要包括如下内容:(1)对半导体硅片企业生产流程和特点进行分析,确定当前MES系统存在的缺陷和不足;(2)借助于统一建模语言技术,对半导体企业MES系统的业务模型进行分析和建立,确定系统的业务环境;(3)对半导体MES系统进行功能结构、体系结构以及网络结构的设计,并采用逐层深入的方式对MES系统的主要功能模块进行详细设计,建立对应的数据模型;(4)在MES系统的生产控制环节引入JBPM工作流技术,实现生产控制、质量控制以及工艺控制的智能化和自动化管理,规范生产流程和生产质量;(5)借助于J2EE技术对MES系统的实现过程进行分析,并通过测试用例的形式分析实现效果。通过对半导体企业进行实施MES系统,可以完善企业对于设备、质量、生产流程的监控,并逐步形成整套的追溯工具和平台,便于企业进行各种信息的追溯,包括处理方法、处理结果、生产车间、操作人员、工序以及产生时间等。实施具有半导体企业特点的MES系统,不但能够对于企业人员进行促进和鞭策,而且可以提高企业的生产效益。同时,随着本MES系统在半导体企业的实施和应用,对于其他企业的研究与应用有一定的借鉴意义。
[Abstract]:With the continuous development of domestic economy and the acceleration of the integration process of the world economy, semiconductor wafer enterprises are facing more and more fierce competition. Semiconductor wafer enterprises have to constantly improve their manufacturing capacity and adaptive level. And to meet the changing needs of customers, in order to be in an invincible position in the fierce competition. Therefore, semiconductor wafer enterprises need to set up a complete solution of MES system, (Manufacture Execute System manufacturing and execution system, in order to enable the enterprise to obtain the necessary development conditions, and to improve the ability of information communication and adaptability. It can be said that the mes system has attracted more and more attention of manufacturing enterprises. Semiconductor silicon wafer enterprises need to establish a set of MES system which accords with the characteristics of enterprises. In this paper, the research and application of MES system is based on the actual production of semiconductor wafer enterprises, with the ultimate goal of satisfying the MES management of semiconductor wafer enterprises. Based on the analysis of the particularity and necessity of semiconductor wafer enterprises' requirement for MES system, this paper establishes the specific direction and category of the research. The design and implementation of the system combines the current advanced object-oriented design J2EE technology and unified modeling language technology. The main research focus and work in this paper are as follows: (1) analyzing the production process and characteristics of semiconductor silicon wafer enterprises to determine the defects and shortcomings of the current MES system; (2) using the Unified Modeling language (UML) technology, The business model of semiconductor enterprise MES system is analyzed and established, and the business environment of the system is determined. (3) the function structure, architecture and network structure of semiconductor MES system are designed. The main function modules of MES system are designed in detail, and the corresponding data model is established. (4) introducing JBPM workflow technology to the production control link of MES system to realize production control. Quality control and intelligent and automatic management of process control to standardize production processes and production quality; (5) with the help of J2EE technology to analyze the implementation of the MES system, and through the form of test cases to analyze the effect of the implementation. By implementing the MES system for semiconductor enterprises, we can improve the monitoring of equipment, quality and production processes, and gradually form a complete set of traceability tools and platforms for enterprises to trace all kinds of information, including processing methods. Process results, workshop, operator, process and production time, etc. The implementation of the MES system with the characteristics of semiconductor enterprises can not only promote and motivate the personnel of enterprises, but also improve the production efficiency of enterprises. At the same time, with the implementation and application of this MES system in semiconductor enterprises, it has certain reference significance for the research and application of other enterprises.
【学位授予单位】：上海交通大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：F426.63;TP311.52

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