某加速度计挠性零件的微细电解加工技术研究

发布时间：2018-04-17 08:26

本文选题：弹性材料 + 微细电解加工　；参考：《西安工业大学》2015年硕士论文

【摘要】：随着微纳米技术的快速发展,微细电解加工技术已成为先进制造技术的一个重要方面。微细电解加工技术可以解决传统加工方法不能实现或难以实现的难切削金属材料微小型零件的加工制造问题。针对某军用飞机加速度计的薄壁挠性零件存在的加工难题(弹性材料难切削、结构尺寸微小成形加工困难等),利用微细电解加工方法对挠性零件上的矩形微槽和梯形状微结构进行了工艺研究,对弹性材料微结构的加工难题的解决和微细电解加工方法的发展都具有促进作用。在微细电解加工理论研究基础上,分析了弹性材料3J21的组成成分,选择了合适的电解液,并进行了工艺参数(加工电压、进给速度、脉冲宽度、电解液浓度等)对弹性材料电解加工精度影响的基础性实验,得到加工弹性材料所需较优的工艺参数组合。通过研究分析微细圆柱电极制作原理和成形规律,采用微细圆形孔在线电解反拷成形方法,成功制作出实验所需的工作段直径为10μm的多阶微细圆柱电极。在分析挠性零件结构的基础上,制定了梯形状微结构和矩形微槽结构的微细电解铣削加工工艺方案。利用微细电解行铣方法加工出了上底宽1.305mm、下底宽0.503mm、高为0.403mm的梯形状微结构。采用粗、精加工两个阶段进行了矩形微槽结构的微细电解铣削加工利用直径为80μm的微细圆柱电极通过行铣进行粗加工,并为精加工留一定加工余量；采用直径为10μmm底面绝缘的微细圆柱电极对矩形微槽的侧面进行环形精修,然后利用侧面绝缘的多阶微细圆柱电极对矩形微槽的底面进行平面行铣,成功加工出槽宽为150.6μmm、槽底厚度为10.5μm、槽底半径为10.3μm的矩形微槽。所加工的梯形状微结构和矩形微槽均满足设计要求。理论分析和实验研究表明,微细电解铣削加工技术是弹性材料镍铁合金3J21材料微小结构的理想加工方法。该研究解决了某军用飞机加速度计挠性零件上微小结构的加工难题,可为同类或相似弹性材料微小结构的难加工问题解决提供借鉴,同时对微细电解加工技术的发展也具有一定促进作用。
[Abstract]:With the rapid development of nanotechnology, micro machining technology has become an important aspect of advanced manufacturing technology. The electrochemical micro machining technology can not solve the processing of traditional processing method realized the hard cutting material micro parts manufacturing problems. Aiming at the problem of machining a military aircraft accelerometer thin flexible parts (elastic material cutting, small size structure forming difficulty, etc.) of the rectangular flexible parts of the micro groove and trapezoid micro structure are studied by using electrochemical micro machining method, have a role in promoting the development and solve the micro electrolytic machining method of elastic material micro structure. The processing problem in ECM on the basis of theoretical research, composition of 3J21 elastic material analysis, select the appropriate electrolyte, and the process parameters (processing power Pressure, feed rate, pulse width, electrolyte concentration) on the basis of electrochemical machining accuracy of elastic material influence, processed elastic material required for the processing of optimum parameters. Through the analysis of cylindrical micro electrode fabrication principle and the forming rule, the online micro forming method of circular hole electrolytic cuffed and successful production work the experimental diameter required for multi order micro cylinder electrodes 10 m. Based on the analysis of the structure of flexible parts, making the trapezoidal shaped micro structure and rectangular micro groove structure micro electrochemical milling process. Using micro electrolysis method for milling processing on the bottom width of 1.305mm, bottom width 0.503mm high trapezoidal shaped 0.403mm micro structure. The rough, finishing two stages of rectangular micro groove structure of micro electrochemical milling with micro cylinder electrodes of 80 m diameter by rough milling Processing, and leave some allowance for finish machining; with the diameter of 10 mm at the bottom side of the insulated cylindrical micro electrode on the rectangular micro groove of annular refinement, and then use the multi order micro cylinder electrodes on the side surface of the insulating rectangular micro groove bottom plane for milling, processing groove width of 150.6 mm, bottom thickness is 10.5 m, bottom radius is 10.3 m rectangular micro groove shape. The processing of micro structure and rectangular micro groove can meet the design requirements. Theoretical analysis and experimental results show that the micro electrochemical milling technology is an ideal processing method of micro structure of elastic material of nickel iron alloy 3J21 material the study solves the problem of machining micro accelerometer military aircraft structure flexible parts, can provide reference for similar or similar to solve the problem of difficult machining of micro structure of elastic material, and the development of electrochemical micromachining technology is It has a certain effect.

【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：V261.5

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