利用多晶硅切割废料制备SiC粉体
发布时间：2018-12-15 17:40
【摘要】：针对目前多晶硅切割废料大量堆积造成环境污染的问题,提出了以多晶硅切割废料为原料,经过盐酸浸出除Fe后,配加活性炭高温反应制备SiC的工艺。首先,对废料成分与碳的反应进行了热力学计算;然后,使用差热分析、X射线衍射和扫描电子显微镜等分析手段,研究了反应温度、反应时间以及废料中的Fe对产物物相组成和形貌的影响。结果表明,切割废料经过酸浸后的主要成分为SiC和Si。碳不能与Fe-Si系合金(FeSi、Fe_5Si_3等)中的Si反应生成SiC,所以为了制备纯度较高的SiC,多晶硅废料反应前必须预先除Fe。当反应温度高于1 400℃时,酸浸后的切割废料与活性炭的反应能够迅速地发生,且反应生成的SiC遗传碳颗粒的形貌。
[Abstract]:In order to solve the problem of environmental pollution caused by mass accumulation of polysilicon cutting waste, the process of preparing SiC from polysilicon cutting waste by hydrochloric acid leaching and high temperature reaction of activated carbon after leaching with hydrochloric acid was put forward. Firstly, the reaction of waste material with carbon was calculated by thermodynamics. Then, the effects of reaction temperature, reaction time and Fe in waste material on the phase composition and morphology of the product were studied by means of differential thermal analysis, X-ray diffraction and scanning electron microscope. The results show that the main components of the cut waste after acid leaching are SiC and Si.. Carbon does not react with Si in Fe-Si alloys (FeSi,Fe_5Si_3 et al.) to form SiC,. In order to prepare high purity SiC, polysilicon scrap, Fe. must be removed in advance. When the reaction temperature is higher than 1 400 鈩，
本文编号：2381041
[Abstract]:In order to solve the problem of environmental pollution caused by mass accumulation of polysilicon cutting waste, the process of preparing SiC from polysilicon cutting waste by hydrochloric acid leaching and high temperature reaction of activated carbon after leaching with hydrochloric acid was put forward. Firstly, the reaction of waste material with carbon was calculated by thermodynamics. Then, the effects of reaction temperature, reaction time and Fe in waste material on the phase composition and morphology of the product were studied by means of differential thermal analysis, X-ray diffraction and scanning electron microscope. The results show that the main components of the cut waste after acid leaching are SiC and Si.. Carbon does not react with Si in Fe-Si alloys (FeSi,Fe_5Si_3 et al.) to form SiC,. In order to prepare high purity SiC, polysilicon scrap, Fe. must be removed in advance. When the reaction temperature is higher than 1 400 鈩，
本文编号：2381041
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