傅里叶变换红外光谱技术测量甲烷气压的实验研究

发布时间：2018-07-23 09:14

【摘要】：烷烃类气体中的碳原子是碱金属激光器中碳粒沉积的唯一来源,因此对碱金属蒸气室内的烷烃气体气压进行高精度无干扰探测有助于定量分析碳粒沉积问题。采用傅里叶变换红外光谱技术,选择主峰右翼的吸收峰(3.369μm)作为特征峰,对甲烷气压进行了定量分析,并分析了蒸气室倾斜对测量精度的影响。实验结果表明,对纯甲烷以及甲烷和氦气配比1…3时的气体,该方法对甲烷气压的测量最大偏差分别为0.055kPa和0.057kPa;当蒸气室倾斜角度大于0.0035rad时,测量偏差将高于0.075%。该定量分析甲烷气压方法的测量精度满足碱金属激光器碳粒沉积问题表征的需求,将为碱金属激光器碳粒沉积机理研究提供参考。
[Abstract]:The carbon atom in alkane gas is the only source of carbon particle deposition in alkali metal laser. Therefore, it is helpful to quantitatively analyze the carbon deposition problem by high precision and no interference detection of alkane gas pressure in alkali metal vapor chamber. Using Fourier transform infrared spectroscopy (FTIR) technique, the absorption peak (3.369 渭 m) on the right side of the main peak is selected as the characteristic peak. The methane pressure is quantitatively analyzed, and the influence of the tilt of the vapor chamber on the measurement accuracy is analyzed. The experimental results show that, for pure methane and the ratio of methane to helium 1. At 3, the maximum deviation for methane pressure measured by this method is 0.055 KPA and 0.057 KPA, respectively, and when the inclination angle of vapor chamber is greater than 0.0035rad, the measurement deviation will be higher than 0.075 KPA. The measurement accuracy of the quantitative analysis of methane pressure can meet the demand of carbon particle deposition in alkali metal lasers, which will provide a reference for the study of carbon deposition mechanism of alkali metal lasers.
【作者单位】：中国科学院电子学研究所高功率气体激光技术部;电子工程学院脉冲功率激光技术国家重点实验室;中国科学院大学;
【基金】：脉冲功率激光技术国家重点实验室基金(SKL2014KF02,SKL2016KF02) 国家自然科学基金(61505212)
【分类号】：TN248;O433

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