压电微悬臂梁智能结构的数学有限元分析

发布时间：2018-03-14 22:11

本文选题：有限元方法　切入点：模态分析　出处：《西安科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：压电微悬臂梁是一种集体积小、成本低、灵敏度高、结构简单以及易于集成等众多优点于一身的微型器件。目前它广泛应用于化学、生物和环境监测等众多领域。之所以利用微压电悬臂梁的动态模式进行检测,是因为其具有频率变化快,灵敏度高,动态范围宽的优点。利用微压电悬臂梁的动态模式可以对某些气体、液体成分进行分析,这已然成为国内外进行研究的热点。虽然微压电悬臂梁的应用具有广阔的前景,但是关于微悬臂梁各种性能参数对它的灵敏度的影响,尚未进行系统性的分析研究。本文以微压电悬臂梁智能结构的数学有限元分析为研究课题,在综述有限元理论和压电微悬臂梁理论的基础上,通过有限元方法,使用有限元分析软件,对微压电悬臂梁进行模拟仿真,并且对其模态分析结果进行验证。主要研究内容包括:(1)两种方式对压电微悬臂梁进行模态分析,其一,通过数学有限元方法推导,数值计算求得其理论解;其二,通过软件模拟仿真,得到其实验解。取其前十阶模态,观察其阵型,并验证理论解与实验解之间的偏差。(2)结合固体物理学知识及数学有限元方法建立数学分析模型,运用大型有限元分析软件,对微悬臂梁进行模拟仿真。研究讨论各个参数如电极层、压电层、二氧化硅层、基底层材料属性、弹性常数及厚度对压电微悬臂梁谐振频率的影响。(3)结合理论知识力一电藕合问题的数理基础,分析各个参数如电极层材料、压电层材料、基底层材料、与二氧化硅层材料对压电微悬臂梁传感灵敏度的影响。研究表明,材料厚度、材料属性、弹性常数均对压电微悬臂梁谐振频率有明显影响。同时,基底层、压电层、电极层、二氧化硅层的材料选择对微压电悬臂梁的传感灵敏度有重要影响。通过对压电微悬臂梁进行理论研究,数值计算,软件模拟,来选择理想的材料属性,设计合适的外形尺寸,涂镀不同的敏感层以及选择恰当的敏感层厚度,这些都对研究设计高灵敏度的微悬臂梁具有十分重要的学术价值和科学意义。
[Abstract]:Piezoelectric microcantilever beam is a kind of micro device with many advantages such as small size, low cost, high sensitivity, simple structure and easy integration. In many fields, such as biological and environmental monitoring, the dynamic mode of micro-piezoelectric cantilever beam is used to detect it because of its fast frequency change and high sensitivity. The advantages of wide dynamic range. Some gases and liquids can be analyzed by using the dynamic mode of micro piezoelectric cantilever beam, which has become a hot research topic at home and abroad. Although the application of micro piezoelectric cantilever beam has a broad prospect, However, the influence of various performance parameters on the sensitivity of the micro cantilever beam has not been systematically studied. In this paper, the mathematical finite element analysis of the intelligent structure of the micro piezoelectric cantilever beam is taken as the research topic. On the basis of summarizing finite element theory and piezoelectric micro cantilever beam theory, the simulation of micro piezoelectric cantilever beam is carried out by finite element method and finite element analysis software. And the results of modal analysis are verified. The main research contents include: 1) two ways of modal analysis of piezoelectric micro-cantilever beam. Firstly, the theoretical solution is obtained by mathematical finite element method and numerical calculation. Through the software simulation, the experimental solution is obtained. Taking the first ten modes, observing the formation, and verifying the deviation between the theoretical solution and the experimental solution, the mathematical analysis model is established with the knowledge of solid state physics and the mathematical finite element method. The finite element analysis software is used to simulate the micro cantilever beam. The properties of various parameters, such as electrode layer, piezoelectric layer, silica layer, substrate material, are studied and discussed. The influence of elastic constant and thickness on resonant frequency of piezoelectric microcantilever beam. The effect of silicon dioxide layer material on the sensitivity of piezoelectric microcantilever beam is studied. The results show that the thickness of the material, the properties of the material and the elastic constant have significant effects on the resonant frequency of the piezoelectric microcantilever beam. At the same time, the substrate, the piezoelectric layer, the electrode layer, the base layer, the piezoelectric layer, the electrode layer, The material selection of silica layer has an important influence on the sensing sensitivity of the micro piezoelectric cantilever beam. Through the theoretical research, numerical calculation and software simulation of the piezoelectric micro cantilever beam, the ideal material properties are selected and the appropriate shape size is designed. It is of great academic value and scientific significance to study and design micro-cantilever beam with high sensitivity by coating different sensitive layer and choosing appropriate thickness of sensitive layer.
【学位授予单位】：西安科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：O241.82

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