高填充因子小孔径仿生复眼结构的制备技术研究

发布时间：2018-05-20 05:24

本文选题：仿生复眼 + 微透镜阵列　；参考：《中国科学院大学(中国科学院光电技术研究所)》2017年硕士论文

【摘要】：生物复眼具有小眼孔径小、数量多且紧密排布在曲面基底上的结构特点,所以它的视场角大、时间分辨率高、对运动物体敏感性强、能量利用率高,这些优越的性能吸引了众多国内外学者对生物复眼进行研究和仿生。从结构上说生物复眼是分布在曲面基底上的高填充因子小孔径微透镜阵列结构,仿生难度较大,现有的制备方法难以同时满足高填充因子、小孔径、制备方法简便易行的要求。本文提出了一套高填充因子小孔径仿生复眼结构的制备方法,该方法首先将光刻胶热熔法制作的小孔径微透镜阵列的填充因子提高到理论最大值,并以此为模板采用软刻蚀技术将微透镜阵列结构制作在聚合物弹性薄膜的表面上,然后利用薄膜两侧气压差将平面微透镜阵列结构拉伸为(凹形)曲面基底上的微透镜阵列结构,最后使用紫外固化胶填充凹形曲面弹性薄膜,固化后获得高填充因子小孔径的仿生复眼结构。本文研究的主要内容包括:(1)分析了生物复眼的结构特点和工作机理,并对仿生复眼的应用前景和制备方法进行了讨论。(2)对仿生复眼结构的参数进行了设计,并分析了光刻胶热熔法制作微透镜阵列的工作机理和工艺过程,利用该方法制作了小眼孔径为26um、周期为30um、填充因子为68.1%的小孔径微透镜阵列。(3)针对光刻胶热熔法制作微透镜阵列填充因子较低的情况,提出一种提高微透镜阵列填充因子、扩大可加工面形范围的方法,并对其实验机理、面形影响因素做了详细分析;然后使用该方法将微透镜阵列的小眼孔径由26um提高到30um、填充因子由68.1%提高到理论最大值90.6%,验证了该方法用于制作高填充因子小孔径微透镜阵列的可行性。(4)针对曲面基底微透镜阵列难以制作的现状,提出一种制备仿生复眼结构的新方法——拓扑映射法,该方法利用气压差将平面微透镜阵列结构转为曲面基底上的仿生复眼结构,并且不同气压差下可以获得不同的曲面基底面形。首先,利用有限元分析软件ANSYS15.0对弹性薄膜的受力形变情况进行分析,获得不同压力下弹性薄膜的位移云图,初步确定合适的内外气压差。然后,研究软刻蚀技术的工作机理及制作工艺,并利用该技术制备了表面带有微透镜阵列结构的聚合物弹性薄膜。最后,设计并搭建实验系统,利用拓扑映射法将平面微透镜阵列结构转为底面直径4mm、高度1.21mm、曲面基底上共有1.6万个小眼(孔径为30um)的仿生复眼结构。对仿生复眼结构的面形和成像效果进行了测试,结果表明,该方法制备的仿生复眼结构均匀性良好、面形光滑、成像清晰,验证了拓扑映射法制备仿生复眼结构的可行性。
[Abstract]:Biological compound eye has the characteristics of small aperture, large number and compact arrangement on curved surface, so it has large field of view, high time resolution, strong sensitivity to moving objects, and high energy utilization rate. These superior properties have attracted many domestic and foreign scholars to study and bionics biological compound eye. The biological compound eye is a microlens array with high filling factor and small aperture distributed on the curved surface, which is difficult to be bionic. The existing preparation methods are difficult to meet the requirements of high filling factor, small aperture and easy to be prepared at the same time. In this paper, a method of preparing bionic compound eye structure with high filling factor and small aperture is proposed. The filling factor of the small aperture microlens array fabricated by hot melt photoresist method is increased to the theoretical maximum. The structure of microlens array was fabricated on the surface of polymer elastic film by soft etching technique. Then the planar microlens array structure is stretched into the microlens array structure on the (concave) curved surface by using the pressure difference between the two sides of the film. Finally, the concave curved surface elastic film is filled with UV curable glue. The bionic compound eye structure with high filling factor and small pore size was obtained after curing. The main contents of this paper are as follows: (1) the structural characteristics and working mechanism of bionic compound eye are analyzed, and the application prospect and preparation method of bionic compound eye are discussed. (2) the parameters of bionic compound eye structure are designed. The working mechanism and process of fabricating microlens array by photolithographic hot melt method are also analyzed. A small aperture microlens array with a aperture of 26um. a period of 30um. and a filling factor of 68.1% was fabricated by using this method. A new method was proposed to improve the filling factor of microlens array for the case of low filling factor of microlens array fabricated by photolithographic hot melt method. The method of expanding the range of machinable surface is analyzed in detail, and its experimental mechanism and influencing factors are analyzed in detail. Then, the aperture of microlens array is raised from 26um to 30 uma, the filling factor is increased from 68.1% to the theoretical maximum of 90.6, and the feasibility of this method for fabricating microlens array with high filling factor is verified. The current situation that microlens arrays on surface substrates are difficult to fabricate, A new method for fabricating bionic compound eye structure is presented, which uses the air pressure difference to transform the planar microlens array structure into the bionic compound eye structure on the curved surface. And different surface shapes can be obtained under different pressure difference. Firstly, the deformation of elastic film is analyzed by using finite element analysis software ANSYS15.0, and the displacement cloud map of elastic film under different pressures is obtained, and the suitable pressure difference between internal and external pressure is preliminarily determined. Then, the working mechanism and fabrication technology of soft etching technology are studied, and the polymer elastic thin films with microlens array structure on the surface are prepared by the technology. Finally, the experimental system is designed and built. The planar microlens array structure is transformed into 4mm bottom diameter and 1.21mm height by using topological mapping method. There are 16000 bionic compound eye structures with aperture of 30 umps on the surface substrate. The surface shape and imaging effect of bionic compound eye structure are tested. The results show that the structure of bionic compound eye prepared by this method has good uniformity, smooth surface shape and clear imaging, which verifies the feasibility of preparing bionic compound eye structure by topological mapping method.
【学位授予单位】：中国科学院大学(中国科学院光电技术研究所)
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：Q811

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