宽带复合波片优化设计与性能表征方法及其应用研究

发布时间：2018-03-24 14:24

本文选题：复合波片　切入点：特征参数表征　出处：《华中科技大学》2016年博士论文

【摘要】：双折射波片是一种十分重要的偏振光学元件,能够使偏振光的两个垂直分量之间产生一定的相位延迟差,从而改变偏振光的偏振态。复合波片是由多个单波片按照光轴成不同夹角组合而成,能够补偿由波长、入射角、温度等变化导致的光学特性的偏差。复合波片同其他偏振器件配合可实现偏振光的改性、调制和检测等,广泛应用于偏振测量、光学成像、激光技术、光学通信等领域。复合波片的偏振光学特性可以用相位延迟量、光轴方位角、旋光角和快慢轴透过率幅值比等特征参数表征,这些光学特性对光学系统的适用光谱范围、测量精度等性能有极大的影响。复合波片的特征参数由各单波片的制作材料、厚度、光轴方位等结构特性和入射光的波长、入射角、温度等应用环境因素决定。因此,研究复合波片优化设计方法、光学特性测量表征、误差分析与校准及其在相关光学系统中的应用等,对提高复合波片偏振光学性能,进而提高相关光学系统的性能具有十分重要的意义。鉴于此,本学位论文围绕复合波片的优化设计、特征参数表征、光轴对准及残余光轴对准误差校准、以及在宽光谱穆勒矩阵椭偏测量系统中的应用等方面开展研究,主要研究工作和创新点包括：基于琼斯等效理论建立了复合波片等效模型,将任意复合波片等效为一个线相位延迟器和一个旋光器(圆相位延迟器)组成的级联系统。在此基础上,提出了GCW宽带消色差复合波片优化设计方法。相比传统波片设计,GCW波片具有更一般的结构,各单波片的中心波长和光轴方位角均为待优化参数,为优化设计提供了更多自由度,从而可以设计出适用更宽波段范围、相位延迟量消色差效果更好的宽带消色差复合波片。基于光波传输理论推导了复合波片视场效应理论,给出了复合波片在任意入射角和方位角下的相位延迟量表达式。在此基础上,提出了宽视场角复合波片的优化设计方法,将正性和负性双折射材料波片组合,用以抵消视场效应带来的相位延迟量偏差；利用有效折射率随入射角变化速率,快速、可靠地计算宽视场角复合波片的设计初值,保证优化设计过程的可靠性和可重复性。提出了基于穆勒矩阵椭偏仪的复合波片特征参数测量表征方法。定义了复合波片各偏振特征参数,基于穆勒矩阵拓展了复合波片等效理论,推导了复合波片特征参数与穆勒矩阵元素之间的表达式。实验表明,相比于现有技术,该方法能够在一次测量中表征出任意复合波片的全部偏振特征参数光谱,包括相位延迟量、光轴方位角、旋光角和快慢轴透过率幅值比。提出了基于复合波片特征参数光谱波动的复合波片光轴对准及残余光轴对准误差校准方法。建立了复合波片特征参数与光轴对准误差之间的理论解析模型,分析了复合波片特征参数光谱波动特性以及不同特征参数光谱波动对复合波片光轴对准误差的灵敏度。实验表明,相比于现有技术,该方法能将光轴对准精度提高近一个量级,并且能够实现光轴对准精度和残余光轴对准误差的定量评估与校准。提出基于GCW复合波片的宽光谱穆勒矩阵椭偏测量系统设计方法。研究了基于GCW复合波片的穆勒矩阵椭偏仪测量系统的系统测量和系统校准等工作原理及其系统优化设计方法。在此基础上,组建了适用波段范围为200-1000nm的基于GCW复合波片的宽光谱穆勒矩阵椭偏仪实验平台,验证了所提穆勒矩阵椭偏仪工作原理和优化设计方法的正确性和有效性,并为本文其他相关内容提供了实验验证平台。
[Abstract]:Birefringent filter is a polarizing optical element is very important, have a certain phase difference between the two vertical component can make the polarized light, thereby changing the polarization state. The composite plate is composed of a plurality of single wave plate according to the axis angle of different combination, can be compensated by the wavelength, incident angle, optical deviation the temperature variation characteristics of composite plate with other devices with polarization modification can realize polarized modulation and detection, etc., are widely used in polarization measurement, optical imaging, laser technology, optical communication and other fields. The polarization optical properties of composite plate can be used to measure the phase retardation and optical axis azimuth angle, rotation angle and speed the shaft transmission amplitude ratio and other characteristic parameters for characterization, spectral range of these optical characteristics of the optical system, greatly affects the measurement precision. The performance parameters of composite plate is composed of single Production of materials, the thickness of the wave plate, the structure characteristics and the optical axis of the incident wavelength, incident angle, decisions on the use of environmental factors such as temperature. Therefore, the optimization design method of composite plate, optical properties characterization, error analysis and calibration in the optical system and its related application, to improve the optical properties of the composite wave plate polarization and then improve the performance of optical system is very important. In view of this, this thesis is focused on the optimization design of composite plate, characteristic parameter, optical axis alignment and residual optical axis alignment error calibration, and the Muller matrix in wide spectral ellipsometry applications in the system to carry out the research, the main research work and innovations including: Jones equivalent theory established the equivalent model of composite plate based on arbitrary composite wave plate is equivalent to a linear phase retarder and a rotary device (circular phase Delay) cascade system. On this basis, put forward the optimization design method of composite plate. Compared with the traditional GCW broadband achromatic wave plate design, GCW plate structure is more general, each single filter center wavelength and azimuth of optical axis are the parameters to be optimized, with a more degree of freedom for optimization design, so as to we can design for a wider spectral range, broadband achromatic phase delay quantity better achromatic wave plate. The theory of wave propagation is derived based on the theory of composite plate of field effect, given the phase composite wave plate at arbitrary incident angle and azimuth angle under the delay expression. On this basis, put forward the design method of a wide viewing angle optimization of composite plate, the positive and negative birefringent material plate combination, the amount of delay deviation to offset the effects of phase field; the effective refractive index changes with incident angle velocity Rate, fast, reliable design and calculation of the initial wide viewing angle of composite plate, ensure the reliability optimization design process and repeatability. The measurement of characteristic parameters of composite plate characterization method of Muller matrix ellipsometer. Based on the definition of the polarization parameters of composite plate, base expanded composite plate equivalent theory to the Muller matrix. The expression between composite plate parameters and Muller matrix elements are derived. The results show that, compared with the prior art, the method can in a measurement in the characterization of full polarization characteristic parameters of arbitrary composite plate light spectrum, including phase delay, azimuth, angle of rotation speed and axial transmittance amplitude ratio is proposed. Error calibration method of optical axis alignment and the alignment of composite plate composite plate parameters and residual spectrum fluctuation. Based on the established parameters of optical axis and optical axis alignment error characteristics of composite plate The theoretical model of the analysis of the characteristic parameters of composite plate spectral fluctuation characteristic and sensitivity of different characteristic parameters of spectral fluctuations on the composite plate axis alignment error. Experimental results show that compared with the existing technology, this method can be a scale near axis alignment to improve the accuracy of quantitative evaluation and calibration, and can achieve the optical axis alignment accuracy and residual the optical axis alignment error. The wide spectrum of GCW composite plate Muller matrix ellipsometry system design method based on the system measurement system. Research on the Muller matrix of GCW composite plate based on elliptic partial instrument measurement and calibration system, working principle and system optimization design method. On this basis, set up suitable range for wide spectral band GCW composite plate Muller matrix ellipsometer experiment platform based on 200-1000nm, verified by Muller matrix ellipsometer working principle and optimization design The correctness and effectiveness of the method are calculated, and the experimental verification platform is provided for the other related contents of this paper.

【学位授予单位】：华中科技大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：O436.3

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