利用低温原子层沉积实现柔性有机电致发光器件的薄膜封装技术研究

发布时间：2018-04-08 10:50

本文选题：有机电致发光二极管　切入点：远程等离子增强原子层沉积　出处：《吉林大学》2017年硕士论文

【摘要】：有机电致发光器件(Organic Light-Emitting Device,OLED)以其具备色域宽、视角广、对比度高、响应快、功耗低以及适用于柔性衬底等特点,在显示和照明领域有着十分广阔的应用前景。但是,OLED技术产业化的过程中仍然面临着诸多亟待解决的困难。OLED中有机材料和金属电极易受空气中的水汽和氧气腐蚀而失去功能性是阻碍OLED发展的重要问题之一。本论文主要探究柔性OLED封装的问题。我们利用远程等离子增强型原子层沉积(Plasma Enhanced Atomic Layer Deposition,PEALD)技术制备ZrO2薄膜结合分子层沉积技术(Molecular Layer Deposition,MLD)制备zircone,获得高效的具有叠层结构的封装薄膜。首先,在研究ZrO2薄膜的生长过程中,我们利用原位质谱仪和原位晶振仪探究了薄膜沉积时的表面化学反应和薄膜沉积状态。通过原位质谱仪发现,在通入氧等离子过程中,腔体内的气氛中检测到H2O,CO,NO以及CO2的产生。可以推测腔体内发生类似燃烧的化学反应,从而证明利用高活性氧等离子体作为前躯体在低温下制备ZrO2的可行性。同时,通过原位晶振仪观测到的薄膜稳定的生长状态,清晰的表现出薄膜表面自限制生长的过程。有趣的是,在我们实验中发现,当生长温度高于200oC,ZrO2薄膜中会生成一定量的腈化物(-CN),影响ZrO2的生长速率。同时,成功的在80oC的低温下,制备性能优异的ZrO2封装薄膜。为了优化封装薄膜的水氧阻隔性能,我们引入了zircone薄层制备有机/无机叠层结构封装薄膜。为此分别制作了四种不同结构的薄膜,可以发现随着嵌入zircone的层数变得密集,封装薄膜的表面形貌变得更加平缓。为了验证封装薄膜的性能,我们对四种不同结构的薄膜进行了水汽透过率测试和器件的寿命测试。并且获得最好的封装薄膜的水汽透过率低至3.08×10-5g.m-2.day-1,制备在PET衬底上的封装器件的连续点亮寿命达到182小时。这比之前利用水和臭氧作为前躯体有了很大的提高。
[Abstract]:Organic Light-Emitting device Ole (Organic Light-Emitting device) has wide color gamut, wide viewing angle, high contrast, fast response, low power consumption and suitable for flexible substrate.However, in the process of industrialization of OLED technology, there are still many difficulties to be solved. It is one of the important problems that hinder the development of OLED that organic materials and metal electrodes are vulnerable to water vapor and oxygen corrosion in the air and lose their functionality.This paper mainly explores the problem of flexible OLED encapsulation.Zirconeal films were prepared by remote plasma Enhanced Atomic Layer deposition (PEALDD) and molecular layer deposition (MLDs) technique. High efficient encapsulated films with stacked structure were obtained.Firstly, in the study of the growth process of ZrO2 thin films, the chemical reaction on the surface and the deposition state of the films were investigated by in situ mass spectrometer and in situ crystal oscillator.By in situ mass spectrometer it was found that the production of CO2 and CO2 were detected in the atmosphere of the cavity in the process of oxygen plasma.It can be speculated that chemical reaction similar to combustion takes place in the chamber, which proves the feasibility of preparing ZrO2 by using high reactive oxygen species plasma as precursor at low temperature.At the same time, the stable growth state of the thin film observed by in situ crystal oscillator clearly shows the process of self-limiting growth on the film surface.Interestingly, we found that when the growth temperature is higher than 200oC / ZrO _ 2 film, a certain amount of nitrilides can be formed, which affects the growth rate of ZrO2.At the same time, ZrO2 packaging films with excellent performance were successfully prepared at low temperature of 80oC.In order to optimize the water and oxygen barrier performance of the encapsulated thin films, zircone thin layer was introduced to prepare organic / inorganic laminated packaging films.For this reason, four kinds of thin films with different structures were prepared, and it was found that the surface morphology of the encapsulated films became more smooth as the number of layers embedded in the zircone became denser.In order to verify the performance of the encapsulated films, the water vapor transmittance and the lifetime of the devices were measured for four kinds of films with different structures.The water vapor transmittance of the best encapsulated film is as low as 3.08 脳 10 ~ (-5) g 路m ~ (-2) day-1, and the continuous lighting lifetime of the packaging device fabricated on PET substrate is up to 182 hours.This is a significant improvement over the previous use of water and ozone as precursors.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN383.1

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