典型微纳结构的气敏检测与结构制备研究
发布时间：2019-07-03 10:02
【摘要】：当前环境污染日趋严重,有机气体检测成为气体检测领域不可或缺的一部分。与此同时,随着微电子技术和微纳制造工艺及其理论的不断完善,气体传感器逐渐向一体化、智能化、图像化及微型化、低能耗和高灵敏度高选择性的方向发展,气敏传感器也逐渐以具有气敏特性的微纳结构气敏元件为核心部件。本学位论文针对有机气体,通过理论、实验和仿真相结合,研究蝶翅微纳结构的光学气敏特性和Zn O纳米线结构的电学气敏特性,主要研究工作包括:针对Morpho蝶翅鳞片微纳结构,搭建了光学实验平台,检测蝶翅样本在甲醇、乙醇饱和蒸汽和氮气中的光学反射谱,结合主成分分析方法,对光谱数据进行降维处理,实现了三种气体的检测和识别;研究了蝶翅结构气敏机理,提出蝶翅结构在有机气体中会在表面形成一层纳米液膜,导致结构的光学特性发生变化;采用Rsoft软件DiffractMOD模块对该蝶翅结构进行建模和仿真,研究了蒸气浓度变化对结构反射谱的影响。进一步,以蝶翅生物样本为模板,结合磁控溅射薄膜制备技术与烧结成型方法,制备出与原蝶翅结构和光学特性相似的蝶翅遗态结构。研究了ZnO半导体对还原性气体的气敏机理,结合Zn O纳米线生长和微纳结构制备工艺,制备出叉指型和对尖型两种气敏微纳结构,并进行了Au颗粒修饰,探索了修饰前后结构气敏特性的变化。研究了350℃最佳测试温度下500ppm到10ppm不同浓度乙醇气体的电流-时间变化曲线,发现Au颗粒修饰对响应时间有所改善的,同时得到有无Au颗粒修饰的叉指型和对尖型气敏元件的浓度-灵敏度曲线,Au颗粒修饰强化了元件对乙醇气体的灵敏度,而叉指型气敏元件气敏特性优于对尖型气敏元件。上述研究工作对于进一步深入研究有机气体检测技术具有良好的指导作用。
[Abstract]:At present, the environmental pollution is becoming more and more serious, and organic gas detection has become an indispensable part in the field of gas detection. At the same time, with the continuous improvement of microelectronics technology, micro-nano manufacturing process and its theory, gas sensors are gradually developing in the direction of integration, intelligence, visualization and miniaturization, low energy consumption and high sensitivity and high selectivity. Gas sensors also gradually take micro-nano structure gas sensors with gas sensing characteristics as the core components. In this thesis, the optical gas sensing properties of butterfly wing micro-nano structure and the electrical gas sensing characteristics of Zn O nanowire structure are studied through the combination of theory, experiment and simulation. The main research work includes: aiming at the micro-nano structure of Morpho butterfly wing scale, an optical experimental platform has been set up to detect the optical reflection spectrum of butterfly wing samples in methanol, ethanol saturated steam and nitrogen, combined with principal component analysis method. The dimension reduction of spectral data is carried out, and the detection and identification of three kinds of gases are realized. The gas sensing mechanism of butterfly wing structure is studied, and it is proposed that the butterfly wing structure will form a layer of nanometer liquid film on the surface of organic gas, which will lead to the change of optical properties of the structure. Rsoft software DiffractMOD module is used to model and simulate the butterfly wing structure, and the effect of vapor concentration change on the reflection spectrum of the structure is studied. Furthermore, using butterfly wing biological sample as template, combined with magnetron sputter thin film preparation technology and sintering method, the residual structure of butterfly wing was prepared, which was similar to the original butterfly wing structure and optical properties. The gas sensing mechanism of ZnO semiconductor to reductive gas was studied. combined with the growth of ZnO nanowires and the preparation process of micro-nano structure, two kinds of gas sensing micro-nano structures, fork finger type and pair tip type, were prepared. Au particles were modified, and the changes of gas sensing properties of the structure before and after modification were explored. The current-time variation curves of different concentrations of ethanol gas from 500ppm to 10ppm at 350 鈩，
本文编号：2509297
[Abstract]:At present, the environmental pollution is becoming more and more serious, and organic gas detection has become an indispensable part in the field of gas detection. At the same time, with the continuous improvement of microelectronics technology, micro-nano manufacturing process and its theory, gas sensors are gradually developing in the direction of integration, intelligence, visualization and miniaturization, low energy consumption and high sensitivity and high selectivity. Gas sensors also gradually take micro-nano structure gas sensors with gas sensing characteristics as the core components. In this thesis, the optical gas sensing properties of butterfly wing micro-nano structure and the electrical gas sensing characteristics of Zn O nanowire structure are studied through the combination of theory, experiment and simulation. The main research work includes: aiming at the micro-nano structure of Morpho butterfly wing scale, an optical experimental platform has been set up to detect the optical reflection spectrum of butterfly wing samples in methanol, ethanol saturated steam and nitrogen, combined with principal component analysis method. The dimension reduction of spectral data is carried out, and the detection and identification of three kinds of gases are realized. The gas sensing mechanism of butterfly wing structure is studied, and it is proposed that the butterfly wing structure will form a layer of nanometer liquid film on the surface of organic gas, which will lead to the change of optical properties of the structure. Rsoft software DiffractMOD module is used to model and simulate the butterfly wing structure, and the effect of vapor concentration change on the reflection spectrum of the structure is studied. Furthermore, using butterfly wing biological sample as template, combined with magnetron sputter thin film preparation technology and sintering method, the residual structure of butterfly wing was prepared, which was similar to the original butterfly wing structure and optical properties. The gas sensing mechanism of ZnO semiconductor to reductive gas was studied. combined with the growth of ZnO nanowires and the preparation process of micro-nano structure, two kinds of gas sensing micro-nano structures, fork finger type and pair tip type, were prepared. Au particles were modified, and the changes of gas sensing properties of the structure before and after modification were explored. The current-time variation curves of different concentrations of ethanol gas from 500ppm to 10ppm at 350 鈩，
本文编号：2509297
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