实验室流化床法制备太阳能级多晶硅研究

发布时间：2018-05-28 14:22

本文选题：能源 + 太阳能级多晶硅　；参考：《青海大学》2010年硕士论文

【摘要】： 随着全球太阳能电池产量快速增加,直接拉动了多晶硅需求的迅猛增长。多晶硅的生产仍是光伏产业链的能力制约因素。目前,太阳能级多晶硅制备的主流技术有改良西门子技术和硅烷法。由于国外技术封锁,我国现在引进的西门子技术三废问题多,能耗大。因此,依托高校以及研究院所,加强新一代低成本工艺技术基础性及前瞻性研究,建立低成本高纯度(太阳能级)多晶硅研究开发的知识及技术创新体系,对多晶硅生产工艺进行进一步开发和完善,获得具有自主知识产权的生产工艺和技术,就具有迫切的现实意义。本研究采用自行设计的流化床反应器,通过还原反应对高纯硅进行反应处理,在其表面沉积出高纯度多晶硅,其中对环境污染小,对外依赖性小。实验中自行设计了一整套以流化床为核心的实验装置,并在此基础上探索了多晶硅的流化床法制备工艺,成功地制备了太阳能级多晶硅,其沉积率达到26.18%,纯度达到99.9992255%-99.9999026%。利用JSM-5610LV/INCA型扫描电子显微镜、MS2000型激光粒度分析仪及ICP光谱仪对样品进行了形貌、粒度变化及纯度分析。
[Abstract]:With the rapid growth of global solar cell output, the demand for polysilicon has increased rapidly. The production of polysilicon is still the ability restriction factor of photovoltaic industry chain. At present, the main technologies of solar-grade polysilicon preparation are improved Siemens technology and silane process. As a result of the foreign technology blockade, our country now imports Siemens technology three waste problem many, the energy consumption is big. Therefore, relying on the universities and research institutes, strengthening the basic and prospective research of the new generation of low-cost technology, the knowledge and technological innovation system of low-cost high-purity (solar grade) polysilicon research and development is established. It is of urgent practical significance to further develop and perfect the polysilicon production process and obtain the production process and technology with independent intellectual property rights. In this study, a self-designed fluidized bed reactor was used to treat high purity silicon through reduction reaction, and high purity polysilicon was deposited on its surface, in which environmental pollution and external dependence were small. A set of experimental devices with fluidized bed as the core was designed in the experiment. On the basis of this, the preparation process of polysilicon by fluidized bed method was explored. The solar grade polycrystalline silicon was successfully prepared. The deposition rate was 26.18% and the purity was 99.9992 255-99.9999026. The morphology, particle size change and purity of the samples were analyzed by JSM-5610LV/INCA scanning electron microscope (SEM) and MS2000 laser particle size analyzer and ICP spectrometer.
【学位授予单位】：青海大学
【学位级别】：硕士
【学位授予年份】：2010
【分类号】：TM914.4

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