喷雾热解法制备氟掺杂二氧化锡导电薄膜及其性能研究

发布时间：2018-06-04 18:19

  本文选题：喷雾热解 + 氟掺杂二氧化锡　； 参考：《合肥工业大学》2010年硕士论文

【摘要】： 氟掺杂二氧化锡导电薄膜(fluorine-doped tin oxide,FTO)因具有高透光率和低电阻被广泛用于太阳能电池和显示设备。采用喷雾热解法,以四氯化锡和氟化铵、1-甲基-3-乙基咪唑三氟乙酸(3-ethyl-1-methylimidazolium trifluoroacetate, EMITA)为原料、水和乙醇、异丙醇为溶剂,喷瓶为雾化装置,在载玻片上制备FTO薄膜。运用X射线衍射仪、扫描电子显微镜、紫外-可见分光光度计和四探针测试仪分别对FTO薄膜进行了表征。研究了喷涂次数、衬底温度、四氯化锡浓度、氟化铵(EMITA)浓度、双氧水浓度和乙醇(异丙醇)与水的体积比对FTO薄膜的透光率和方块电阻的影响。 当衬底温度为500℃,SnCl4浓度为0.81 mol/L,NH4F浓度为0.1 mol/L,乙醇与水的体积比为8：2,喷涂100次时,所得FTO薄膜在可见光区的平均透光率为76%,方块电阻为13Ω／□。 在喷雾热解液中加入少量的H2O2 (0.05 mol/L)可明显提高FTO薄膜在可见光区的透光率,而不影响其方块电阻；当喷雾热解液组成为0.8 mol/L SnCl4, 0.1 mol/L NH4F,0.05 mol/L H2O2,异丙醇与水的体积比为8：2,衬底温度为500℃,喷涂100次时,所得FTO薄膜在可见光区的平均透光率为84%,方块电阻为15Ω/□,且FTO薄膜平整致密、二氧化锡晶粒均匀。 当衬底温度为500℃,SnCl4浓度为0.4 mol/L,EMITA浓度为0.3 mol/L,乙醇与水的体积比为8：2,喷涂100次时,所得FTO薄膜在可见光区的平均透光率为73%,方块电阻为173Ω/□。
[Abstract]:Fluorine-doped tin oxide (FTO) thin film is widely used in solar cells and display devices because of its high transmittance and low resistance. FTO thin films were prepared on glass slides by spray pyrolysis with tin tetrachloride and ammonium fluoride 1-methyl-3-ethyl-1-methylimidazolium trifluoroacetate (EMITAate) as raw materials, water and ethanol as solvent, isopropanol as solvent, spray bottle as atomizer. FTO thin films were characterized by X-ray diffractometer, scanning electron microscope, UV-Vis spectrophotometer and four-probe tester. The spraying times, substrate temperature, tin tetrachloride concentration and EMITAA concentration were studied. Effects of hydrogen peroxide concentration and volume ratio of ethanol (isopropanol) to water on the transmittance and sheet resistance of FTO thin films. When the substrate temperature is 500 鈩，

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