磁控溅射法制备YBCO原子层热电堆薄膜研究
发布时间：2018-08-28 13:32
【摘要】：YBCO外延地生长在倾斜的SrTiO3衬底上时,YBCO薄膜表面法向与YBCO的c轴成α角,若有激光光沿z轴方向入射YBCO表面时,z轴有激光感生热电电压产生。这种热电材料称为原子层热电材料。这种激光感生热电电压器件(LITV)具有响应快(纳秒到皮秒)、响应光谱宽(光谱范围从紫外到红外)、灵敏度高、非制冷探测、高稳定性、易集成、成本低廉的特点,有很广阔的应用前景。本文就YBCO的制备、薄膜的生长条件、不同条件对薄膜的影响,以及YBCO原子层热电堆进行了研究： 1、采用固相法制备YBCO,对不同的烧结温度进行了研究。分别对890℃、900℃、910℃、920℃、930℃温度下制备的YBCO经XRD分析发现,920℃温度下制备的YBCO杂相少,质量最好。 2、采用直流磁控溅射法制备了YBCO薄膜,研究了YBCO薄膜生长过程中不同条件对薄膜生长的影响,包括不同总气压、氧氩比、厚度和退火温度,通过XRD分析,当总气压为40Pa、氧氩比为1：2、厚度为1μm、退火温度为800℃时,是薄膜生长的最佳条件。 3、以总气压为40Pa、氧氩比为1：2、厚度为1μm、退火温度为800℃为实验条件,在倾斜角为20。的SrTiO3上生长了厚度为1μm的YBCO薄膜,制作成为激光感生热电电压器件,并设计了测量系统进行了测量,结果表明LITV与激光能量成线性关系。
[Abstract]:When YBCO epitaxially grows on an inclined SrTiO3 substrate, the surface of YBCO films is normally 伪 -angled with the c axis of YBCO. If laser light is incident into the YBCO surface along the z axis, the laser induced thermoelectric voltage is generated in the z axis. This thermoelectric material is called atomic layer thermoelectric material. This laser-induced thermoelectric voltage device (LITV) is characterized by fast response (nanosecond to picosecond), wide response spectrum (spectrum range from ultraviolet to infrared), high sensitivity, uncooled detection, high stability, easy integration and low cost. It has a broad application prospect. In this paper, the preparation of YBCO, the growth conditions of the films, the effects of different conditions on the films, and the YBCO atomic layer thermoelectric stacks are studied. 1. The preparation of YBCO, by solid phase method has been studied at different sintering temperatures. The YBCO prepared at 890 鈩，
本文编号：2209533
[Abstract]:When YBCO epitaxially grows on an inclined SrTiO3 substrate, the surface of YBCO films is normally 伪 -angled with the c axis of YBCO. If laser light is incident into the YBCO surface along the z axis, the laser induced thermoelectric voltage is generated in the z axis. This thermoelectric material is called atomic layer thermoelectric material. This laser-induced thermoelectric voltage device (LITV) is characterized by fast response (nanosecond to picosecond), wide response spectrum (spectrum range from ultraviolet to infrared), high sensitivity, uncooled detection, high stability, easy integration and low cost. It has a broad application prospect. In this paper, the preparation of YBCO, the growth conditions of the films, the effects of different conditions on the films, and the YBCO atomic layer thermoelectric stacks are studied. 1. The preparation of YBCO, by solid phase method has been studied at different sintering temperatures. The YBCO prepared at 890 鈩，
本文编号：2209533
本文链接：https://www.wllwen.com/shekelunwen/minzhuminquanlunwen/2209533.html
