斐索型同步移相干涉测试技术研究

发布时间：2018-06-13 17:16

本文选题：光学测量 + 斐索干涉　；参考：《南京理工大学》2017年硕士论文

【摘要】：同步移相干涉测试技术是目前抗振效果最好的干涉测量手段,目前大多数同步移相方案采用了泰曼型结构形式,而斐索型干涉仪由于其共光路的特点,适用于检测平面元件。目前已有的几种斐索型结构都不适合于长干涉腔长下的平面元件的测试,针对长干涉腔长的测试需求,提出一种新的同步移相干涉测试方案。以斐索型移相干涉仪的结构为基础,采用四分之一波片作为参考镜,得到一对正交偏振光。正交偏振光经过棋盘相位光栅后形成不同衍射级次的光线,(±1,±1)级衍射光的衍射效率相同,通过特制的光阑选取这四束光线,使这四束光线先后通过相位延迟阵列和偏振片获得4幅移相量依次为π/2的干涉图。运用琼斯矩阵分析了基于四分之一波片的斐索型同步移相方案的原理。从干涉系统、分光系统、移相系统和数据采集系统几个方面设计与研制了该方案的关键器件并搭建了实验装置。对平面元件进行了测量,将波面测量结果与ZYGO干涉仪的测量结果比较,得到面形的峰谷值相差0.004λ,均方根误差值相差0.001λ。详细讨论了各个元器件所带来的误差,主要针对四分之一波片的移相量误差、快轴位置误差、偏振片方位角误差、相位延迟阵列的移相误差进行了讨论,得出整个装置的系统误差为λ/10。该方案相比泰曼型同步移相干涉测量方案可以简化系统结构,减小系统误差,并且更易装校,适合用于长干涉腔长下平面元件的测量,并且能有效减小干涉测量中振动带来的影响。
[Abstract]:The technique of synchronous phase shift interferometry is the best method to resist vibration at present. At present, most of the synchronous phase shifting schemes adopt the Tymanian structure, while the Fesso interferometer is suitable for detecting planar elements because of its common optical path. At present, several kinds of Fieso type structures are not suitable for the measurement of planar elements with long interference cavity length. A new synchronous phase shift interferometric testing scheme is proposed to meet the test requirements of long interference cavity length. A pair of orthogonal polarized light is obtained by using 1/4 wave plate as reference mirror on the basis of the structure of Fisso type phase-shifting interferometer. The diffraction efficiency of orthogonal polarized light with different diffraction order (卤1, 卤1) is the same after passing through the chessboard phase grating. The four beams are selected through a special aperture. Through the phase delay array and the polarizer, the four beams are used to obtain the interferogram with the phasor of 蟺 / 2 in turn. The principle of Fieso synchronous phase shift scheme based on 1/4 wave plate is analyzed by Jones matrix. The key devices of the scheme are designed and developed from the aspects of interference system, light splitting system, phase shifting system and data acquisition system. The plane element is measured. The difference of peak and valley value of plane shape is 0.004 位 and the difference of root mean square error is 0.001 位 by comparing the measured result of wave surface with that of ZYGO interferometer. The error caused by each component is discussed in detail. The phase shift error of 1/4 wave plate, the position error of fast axis, the azimuth error of polarizer and the phase shift error of phase delay array are discussed. It is concluded that the systematic error of the whole device is 位 / 10. The proposed scheme can simplify the structure of the system, reduce the system error, and be easier to fit and calibrate, compared with the Tyman synchronous phase shift interferometry. It is suitable for the measurement of plane elements with long interference cavity length. And it can effectively reduce the effect of vibration in interferometry.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O436.1

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