氧气流量对MPCVD法制备超纳米金刚石膜的影响

发布时间：2018-01-29 15:39

本文关键词： 氧气流量 MPCVD 超纳米金刚石膜金刚石含量　出处：《材料导报》2017年S1期 　论文类型：期刊论文

【摘要】：采用微波等离子化学气相沉积技术,以CH_4/H_2/Ar为气源,通过调节O_2流量,增强等离子体对非金刚石相的刻蚀能力,提高超纳米金刚石膜中金刚石相的含量。并利用扫描电子显微镜(SEM)、X射线衍射(XRD)、拉曼光谱及X射线光电子能谱(XPS)分别对超纳米金刚石膜的形貌、生长速率、晶型、晶粒尺寸及金刚石含量进行了表征分析,重点研究了O_2流量对晶粒尺寸及金刚石含量的影响。实验结果表明,随O_2流量的增加,平均晶粒尺寸从8.4nm增大至16.1nm,随后减小至9.6nm;当O_2流量为0.7sccm时,金刚石相含量由71.58%提升至85.46%,平均晶粒尺寸约为9.6nm。
[Abstract]:By using microwave plasma chemical vapor deposition and CH_4/H_2/Ar as gas source, the etching ability of plasma to non-diamond phase was enhanced by adjusting the flow rate of O _ (2). The content of diamond phase in ultrananocrystalline diamond films was increased, and the X-ray diffraction (XRD) was performed by scanning electron microscope (SEM). Raman spectra and X-ray photoelectron spectroscopy (XPS) were used to characterize the morphology, growth rate, crystal shape, grain size and diamond content of ultrananocrystalline diamond films. The effect of O _ 2 flow rate on grain size and diamond content was studied. The experimental results show that the average grain size increases from 8.4 nm to 16.1 nm with the increase of O _ 2 flow rate. Then decreased to 9.6 nm; When the flow rate of O _ 2 is 0.7sccm, the content of diamond phase increases from 71.58% to 85.46, and the average grain size is about 9.6 nm.
【作者单位】：昆明理工大学超硬材料先进制备技术国际联合研究中心;昆明理工大学非常规冶金教育部重点实验室;云南民族大学化学与环境学院;昆明理工大学微波能工程应用与装备技术国家地方联合工程实验室;昆明理工大学冶金与能源工程学院;
【基金】：国家自然科学基金(51604134) 云南省教育厅科学研究基金(2016ZZX040) 国家国际科技合作项目对俄专项(2015DFR50620) 昆明市科技计划项目(2014-04-A-H-02-3085)
【分类号】：TQ163
【正文快照】： (1 State International Joint Research Center of Advanced Technology for Superhard Materials,Kunming University of Scienceand Technology,Kunming 650093;2 Key Laboratory of Unconventional Metallurgy,Ministry of Education,KunmingUniversity of Science and Te

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